Method of performing a qualification action on an exposure apparatus

A method of performing a system qualification action relating to an exposure apparatus or a component thereof, the method comprising:

• obtaining test timing data relating to one or more test timing parameters, each test timing parameter describing a respective system action duration, wherein each system action duration describes a duration of a respective system action of the exposure apparatus or component thereof;
• obtaining reference timing test data comprising reference values for the one or more system action durations;
• and
• qualifying the exposure apparatus or component thereof in terms of one or more quality performance parameters based on a comparison of the test timing data and the reference timing test data.