Pre-jig wafer carrier disc installation/uninstallation device and method thereof
AssigneeKingtek Elec-Technology Co., Ltd.
InventorMao-Yen Sung
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AssigneeKingtek Elec-Technology Co., Ltd.
InventorMao-Yen Sung
Estimating the term…
A pre-jig wafer carrier disc installation/uninstallation device and a method thereof, including a first displacement mechanism, a wafer frame installation/uninstallation mechanism, a wafer installation/uninstallation mechanism, a mask installation/uninstallation mechanism and a robotic arm arranged around the first displacement mechanism. The said mechanisms sequentially stack the wafer frame, the wafer and the mask on the first displacement mechanism to form an assembly. An installation/uninstallation mechanism is disposed at a movable end of the robotic arm. The robotic arm drives the installation/uninstallation mechanism to remove and lock the assembly on an assembly carrier section of a carrier disc for successive processing. After the wafers are processed, the robotic arm drives the installation/uninstallation mechanism to move the assembly back onto the first displacement mechanism. The said mechanisms sequentially disassemble the assembly and recover the mask, the wafer and the wafer frame.
A pre-jig wafer carrier disc installation/uninstallation device comprising:
Dependencies are inferred from the claim text.