H10N 30/082
By etching
Official title: by etching, e.g. lithography
H10N30/082 (By etching) appears on 427 US grants and 513 published applications in this corpus.
Search patents in H10N- Granted patents
- 427
- Published applications
- 513
- Assignees
- 225
- Inventors
- 969
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 0 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 2 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 1 | 0 |
| 1992 | 0 | 0 |
| 1993 | 1 | 0 |
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 2 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 4 | 2 |
| 2002 | 1 | 1 |
| 2003 | 3 | 7 |
| 2004 | 4 | 8 |
| 2005 | 5 | 8 |
| 2006 | 8 | 6 |
| 2007 | 3 | 4 |
| 2008 | 2 | 5 |
| 2009 | 6 | 11 |
| 2010 | 6 | 16 |
| 2011 | 8 | 23 |
| 2012 | 9 | 22 |
| 2013 | 15 | 22 |
| 2014 | 21 | 29 |
| 2015 | 23 | 29 |
| 2016 | 32 | 33 |
| 2017 | 25 | 31 |
| 2018 | 27 | 46 |
| 2019 | 34 | 36 |
| 2020 | 35 | 35 |
| 2021 | 19 | 30 |
| 2022 | 34 | 25 |
| 2023 | 32 | 35 |
| 2024 | 20 | 19 |
| 2025 | 22 | 15 |
| 2026 | 16 | 15 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Piezoelectric element, method for manufacturing piezoelectric element, and liquid ejection head6 Oct 2026US 12,757,636 B2Canon Kabushiki Kaisha
- Heterostructure and method of fabrication22 Sep 2026US 12,744,508 B2Soitec
- Manufacturing method of piezoelectric element, piezoelectric element, and liquid droplet dispensing head22 Sep 2026US 12,745,565 B2Seiko Epson Corporation
- Piezoelectric stack, method of manufacturing piezoelectric stack, and piezoelectric element18 Aug 2026US 12,713,833 B2Sumitomo Chemical Company, Limited
- Plasma etching26 May 2026US 12,642,022 B2SPTS Technologies Limited
- Deposition apparatus, method of manufacturing the deposition apparatus, and electronic device manufactured using the deposition apparatus27 Aug 2026US 2026/0250827 A1Samsung Display Co., Ltd.
- Piezoelectric microelectromechanical device and method of manufacture20 Aug 2026US 2026/0247864 A1Aalto University Foundation sr
- Piezoelectric stack, method for manufacturing piezoelectric stack, and piezoelectric element13 Aug 2026US 2026/0239882 A1Sumitomo Chemical Company, Limited
- Semiconductor device and methods of formation25 Jun 2026US 2026/0182251 A1Taiwan Semiconductor Manufacturing Company.Ltd
- High power seed layer patterning on piezoelectric thin films for piezoelectric device fabrication18 Jun 2026US 2026/0173760 A1APPLIED Materials.Inc.
Most cited
By later US patents
- Method for providing a piezoelectric multilayer124US 8,813,324 B2Western Digital (Fremont), LLC · 2014
- Electronic component having micro-electrical mechanical system100US 7,053,456 B2Kabushiki Kaisha Toshiba · 2006
- Piezoelectric resonating device93US 4,642,508 AKabushiki Kaisha Toshiba · 1987
- Micromechanical piezoelectric device69US 6,953,977 B2Boston MicroSystems, Inc. · 2005
- Method for fabricating glass-backed transducers and glass-backed structures66US 3,951,707 AKulite Semiconductor Products, Inc. · 1976