H05G 2/0092
Housing of the apparatus for producing x-rays
Official title: {Housing of the apparatus for producing X-rays; Environment inside the housing}
H05G2/0092 (Housing of the apparatus for producing x-rays) appears on 89 US grants and 102 published applications in this corpus.
Search patents in H05G- Granted patents
- 89
- Published applications
- 102
- Assignees
- 37
- Inventors
- 292
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1985 | 1 | 0 |
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 0 |
| 2002 | 0 | 0 |
| 2003 | 1 | 1 |
| 2004 | 0 | 5 |
| 2005 | 1 | 2 |
| 2006 | 2 | 2 |
| 2007 | 2 | 3 |
| 2008 | 2 | 1 |
| 2009 | 2 | 5 |
| 2010 | 3 | 2 |
| 2011 | 1 | 4 |
| 2012 | 4 | 2 |
| 2013 | 2 | 3 |
| 2014 | 8 | 4 |
| 2015 | 1 | 3 |
| 2016 | 6 | 7 |
| 2017 | 2 | 0 |
| 2018 | 5 | 3 |
| 2019 | 6 | 4 |
| 2020 | 4 | 8 |
| 2021 | 6 | 9 |
| 2022 | 9 | 6 |
| 2023 | 5 | 9 |
| 2024 | 3 | 3 |
| 2025 | 5 | 8 |
| 2026 | 3 | 8 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Extreme ultraviolet light source device6 Oct 2026US 12,757,312 B2Samsung Electronics Co., Ltd.
- Radiation source module and lithographic apparatus10 Mar 2026US 12,572,078 B2ASML Netherlands B. V.
- Semiconductor processing tool and methods of operation6 Jan 2026US 12,520,385 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Lithography apparatus and method21 Oct 2025US 12,449,734 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Methods of servicing photolithographic apparatus2 Sep 2025US 12,405,541 B2Taiwan Semiconductor Manufacturing Company.Ltd
- X-ray analysis system with laser-driven source13 Aug 2026US 2026/0239520 A1Bruker Technologies Ltd.
- Radiation source module and lithographic apparatus16 Apr 2026US 2026/0104647 A1ASML Netherlands B. V.
- Euv light generation apparatus and electronic device manufacturing method16 Apr 2026US 2026/0107367 A1Gigaphoton Inc.
- Extreme ultraviolet light generation apparatus and electronic device manufacturing method9 Apr 2026US 2026/0101428 A1Gigaphoton Inc.
- Semiconductor processing tool and methods of operation2 Apr 2026US 2026/0095978 A1Taiwan Semiconductor Manufacturing Company.Ltd
Most cited
By later US patents
- X-ray source77US 4,538,291 AKabushiki Kaisha Suwa Seikosha · 1985
- Laser-driven light source47US 7,989,786 B2Energetiq Technology, Inc. · 2011
- Laser-driven light source39US 8,309,943 B2Energetiq Technology, Inc. · 2012
- Method of generating EUV radiation, method of manufacturing a device by means of said radiation, EUV radiation source unit, and lithographic projection apparatus provided with such a radiation source unit34US 6,304,630 B1U. S. Philips Corporation · 2001
- System managing gas flow between chambers of an extreme ultraviolet (EUV) photolithography apparatus30US 7,812,329 B2Cymer, Inc. · 2010