Extreme ultraviolet light source device

An extreme ultraviolet light source device, comprising:

• a chamber including a condensing mirror, and a body on the condensing mirror and having an intermediate focus that is configured to have extreme ultraviolet light that is reflected by the condensing mirror be emitted, and the chamber including first and second exhaust ports that are spaced apart from the intermediate focus;
• a droplet supply configured to supply a droplet to generate the extreme ultraviolet light in the chamber;
• a light source configured to generate the extreme ultraviolet light from the droplet by oscillating a laser;
• a catch configured to receive the droplet discharged from the droplet supply;
• a first exhaust connected to the first exhaust port;
• and
• a second exhaust connected to the second exhaust port,
• wherein the first exhaust port is on a first level, and the second exhaust port is on a second level above the first level, the second level is equal to or lower than a level of the intermediate focus.

An extreme ultraviolet light source device, comprising:

• a chamber having an intermediate focus which is configured to have extreme ultraviolet light that is reflected by a condensing mirror be emitted, and at least one upper exhaust port on an upper surface of the chamber, spaced apart from the intermediate focus by a first distance in a horizontal direction, located at a level equal to or lower than a level of the intermediate focus within a second distance in a vertical direction;
• a droplet supply configured to supply a droplet to generate the extreme ultraviolet light in the chamber;
• a light source unit configured to generate the extreme ultraviolet light from the droplet by oscillating a laser;
• and
• a catch configured to receive the droplet discharged from the droplet supply.