Semiconductor processing tool and methods of operation

A method, comprising:

• receiving, by a controller and from a temperature sensor of a cover of a bucket, data indicating a temperature of an interior surface of the cover;
• determining, by the controller and based on the data, that a likelihood of a blockage of a flow of a liquified target material from a drain port of a transport ring of an extreme ultraviolet (EUV) radiation source directly into the bucket is increasing;
• determining, by the controller based on determining that the likelihood of the blockage is increasing, one or more adjusted settings associated with a component of a heating system,
• wherein the component is different from the temperature sensor,
• wherein the heating system includes a heat-generating component in the cover, and
• wherein the heating system is configured to provide heat to the cover through which the liquified target material flows into the bucket;
• and
• transmitting, by the controller to the heating system based on determining the one or more adjusted settings, a signal indicating the one or more adjusted settings to cause the heating system to increase a rate of change at which the heating system provides the heat to the cover to reduce the likelihood of the blockage.

An extreme ultraviolet (EUV) radiation source, comprising:

• a vessel;
• a bucket configured to collect a liquified target material from the vessel;
• a conduit between the vessel and the bucket;
• a transport ring including a drain port through which the liquified target material flows directly into the conduit;
• a heating system configured to provide a heat to prevent the liquified target material from solidifying and creating a blockage of the conduit,
• wherein the heating system includes a heat-generating component in a cover of the bucket, and a temperature sensor in the cover of the bucket;
• and
• a controller configured to:
• receive, from the temperature sensor, data indicating a temperature of an interior surface of the cover, and
• transmit a signal to activate the heat-generating component.