H03H 9/2457
Clamped-free beam resonators
Official title: {Clamped-free beam resonators}
H03H9/2457 (Clamped-free beam resonators) appears on 138 US grants and 129 published applications in this corpus.
Search patents in H03H- Granted patents
- 138
- Published applications
- 129
- Assignees
- 66
- Inventors
- 215
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 1 | 0 |
| 2000 | 1 | 0 |
| 2001 | 1 | 1 |
| 2002 | 2 | 1 |
| 2003 | 1 | 6 |
| 2004 | 3 | 2 |
| 2005 | 1 | 6 |
| 2006 | 5 | 6 |
| 2007 | 3 | 8 |
| 2008 | 3 | 5 |
| 2009 | 7 | 7 |
| 2010 | 8 | 9 |
| 2011 | 10 | 11 |
| 2012 | 6 | 10 |
| 2013 | 5 | 5 |
| 2014 | 13 | 9 |
| 2015 | 7 | 8 |
| 2016 | 8 | 3 |
| 2017 | 6 | 2 |
| 2018 | 7 | 5 |
| 2019 | 7 | 3 |
| 2020 | 3 | 6 |
| 2021 | 4 | 7 |
| 2022 | 3 | 1 |
| 2023 | 9 | 3 |
| 2024 | 8 | 3 |
| 2025 | 4 | 1 |
| 2026 | 1 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Resonator electrode shields8 Sep 2026US 12,732,160 B1SiTime Corporation
- Non-lid-bonded MEMS resonator with phosphorus dopant14 Oct 2025US 12,445,107 B2SiTime Corporation
- Resonator and method of forming the same7 Oct 2025US 12,438,516 B2Agency for Science, Technology and Research
- Resonant elements and oscillators19 Aug 2025US 12,391,543 B1SiTime Corporation
- Resonator electrode shields28 Jan 2025US 12,212,304 B1SiTime Corporation
- MEMS Resonator9 Apr 2026US 2026/0100692 A1SiTime Corporation
- Metal ribs in electromechanical devices20 Mar 2025US 2025/0096768 A1
- Resonator and Method of Forming the Same11 Jul 2024US 2024/0235522 A9Agency for Science, Technology and Research
- Resonator and Method of Forming the Same25 Apr 2024US 2024/0137001 A1Agency for Science, Technology and Research
- Non-Lid-Bonded MEMS Resonator With Phosphorus Dopant15 Feb 2024US 2024/0056054 A1SiTime Corporation
Most cited
By later US patents
- Vacuum-cavity MEMS resonator109US 6,808,954 B2Intel Corporation · 2004
- Monolithic circuit with integrated bulk structure resonator93US 5,260,596 AMotorola, Inc. · 1993
- Micromechanical electrostatic resonator79US 7,215,061 B2Seiko Epson Corporation · 2007
- Temperature compensation for silicon MEMS resonator77US 6,987,432 B2Robert Bosch GmbH · 2006
- Process for fabricating single crystal resonant devices that are compatible with integrated circuit processing72US 6,238,946 B1International Business Machines Corporation · 2001