Resonator electrode shields
AssigneeSiTime Corporation
InventorsDavid Raymond Pedersen, Aaron Partridge, Thor Juneau
Life of this patent
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Abstract
A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure. The first drive electrode generates a time-varying electrostatic force that causes the resonant semiconductor structure to resonate mechanically, and the first sense electrode generates a timing signal in response to the mechanical resonance of the resonant semiconductor structure. The electrically conductive shielding structure is disposed between the first drive electrode and the first sense electrode to shield the first sense electrode from electric field lines emanating from the first drive electrode.
Claims20
A microelectromechanical systems (MEMS) resonator system comprising:
- system elements, including a body, a first electrode, a second electrode and one or more support structures, a first one of the first electrode and the second electrode to supply a stimulus to cause the body to vibrate during operation of the MEMS resonator system and a second one of the first electrode and the second electrode to sense a frequency of vibration of the body during operation of the MEMS resonator system, the one or more support structures supporting the body;
- wherein further, the MEMS resonator system comprises a coupling shield configured to impede the existence of capacitive coupling between two or more of the system elements during operation of the MEMS resonator system.
A microelectromechanical systems (MEMS) resonator system comprising:
- system elements, including a body, a first electrode, a second electrode and one or more support structures, wherein
- a first one of the first electrode and the second electrode is to supply a stimulus to cause the body to vibrate during operation of the MEMS resonator system,
- a second one of the first electrode and the second electrode is to sense a frequency of vibration of the body during operation of the MEMS resonator system, and
- the one or more support structures are to mount the body;
- wherein further, the MEMS resonator system comprises at least one coupling shield configured to impede the existence of capacitive coupling between two or more of the system elements during operation of the MEMS resonator system.
Dependencies are inferred from the claim text.