Temperature compensation for silicon MEMS resonator
AssigneeRobert Bosch GmbH
InventorsMarkus Lutz, Aaron Partridge
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Abstract
Thermally induced frequency variations in a micromechanical resonator are actively or passively mitigated by application of a compensating stiffness, or a compressive/tensile strain. Various composition materials may be selected according to their thermal expansion coefficient and used to form resonator components on a substrate. When exposed to temperature variations, the relative expansion of these composition materials creates a compensating stiffness, or a compressive/tensile strain.
Claims25
A method of compensating for thermally induced frequency variations in a microelectromechanical resonator having a desired resonance frequency, wherein the microelectromechanical resonator comprises an oscillating beam and a counterelectrode, the method comprising:
- determining an actual operating frequency of the micromechanical resonator;
- and
- applying a compensating stiffness to the oscillating beam in relation to the actual operating frequency and the desired resonance frequency so that the resonator provides the desired resonance frequency over a range of temperatures, wherein applying a compensating stiffness includes applying an electrostatic force to the oscillating beam via the counterelectrode.
A method of compensating for thermally induced frequency variations in a microelectromechanical resonator disposed on or in a substrate and having a desired resonance frequency, wherein the microelectromechanical resonator comprises counterelectrode and a laterally oscillating beam which oscillates in a direction that is substantially parallel to the substrate, the method comprising:
- determining an actual operating frequency of the microelectromechanical resonator;
- and
- applying a compensating stiffness to the laterally oscillating beam in relation to the actual operating frequency and the desired resonance frequency so that the resonator provides the desired resonance frequency over a range of temperatures, wherein applying a compensating stiffness includes applying an electrostatic force to the laterally oscillating beam via the counterelectrode.
Dependencies are inferred from the claim text.