Micromechanical electrostatic resonator

A micromechanical electrostatic resonator, comprising:

• a planar-shaped vibration body;
• a pair of excitation electrodes arranged oppositely to each other at both sides of the vibration body with a gap from an outer circumferential portion of the vibration body;
• a feeding device to apply in-phase alternating-current power to the pair of excitation electrodes;
• and
• a detecting device to obtain an output corresponding to a change in capacitance between the vibration body and the excitation electrodes,
• the planar shape of the vibration body taking a shape having a curved outline which includes neck portions
• the vibration body being supported by a supporting portion formed on a substrate and being constructed in a shape which is stretched in the vicinity of the supporting portion,
• a wiring layer conductively connected to at least one of the vibration body and the excitation electrode,
• a distance from the wiring layer to the substrate being larger than a distance from the at least one of vibration body and the excitation electrode to the substrate,
• the wiring layer being formed on an insulating layer which includes a surface spaced from the substrate, farther than a surface on which the at least one of vibration body and the excitation electrode is to be formed.