Resonator and method of forming the same
AssigneeAgency for Science, Technology and Research
InventorsSagnik Ghosh, Eldwin Jiaqiang Ng, Jaibir Sharma, Srinivas Merugu
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Abstract
Various embodiments may relate to a resonator. The resonator may include a support including a substrate portion, and a membrane portion extending from the substrate portion over a cavity. The resonator may also include a piezoelectric layer on the membrane portion. The resonator may further include an electrode on the piezoelectric layer. The substrate portion may include dopants of a first conductivity type. The membrane portion may include dopants of a second conductivity type different from the first conductivity type. A ratio of a thickness of the membrane portion to a combined thickness of the electrode and the piezoelectric layer may be above 3:1 for temperature compensation.
Claims20
A resonator comprising:
- a support comprising a substrate portion, and a membrane portion extending from the substrate portion over a cavity;
- a piezoelectric layer on the membrane portion;
- and
- an electrode on the piezoelectric layer;
- wherein the substrate portion comprises dopants of a first conductivity type;
- wherein the membrane portion comprises dopants of a second conductivity type different from the first conductivity type;
- and
- wherein a ratio of a thickness of the membrane portion to a combined thickness of the electrode and the piezoelectric layer is above 3:1 for temperature compensation.
A method of forming a resonator, the method comprising:
- forming a support comprising a substrate portion, and a membrane portion extending from the substrate portion over a cavity;
- forming a piezoelectric layer on the membrane portion;
- and
- forming an electrode on the piezoelectric layer;
- wherein the substrate portion comprises dopants of a first conductivity type;
- wherein the membrane portion comprises dopants of a second conductivity type different from the first conductivity type;
- and
- wherein a ratio of a thickness of the membrane portion to a combined thickness of the electrode and the piezoelectric layer is above 3:1 for temperature compensation.
Dependencies are inferred from the claim text.