H02N 13/00
Clutches or holding devices using electrostatic attraction
Official title: Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
H02N13/00 (Clutches or holding devices using electrostatic attraction) appears on 675 US grants and 657 published applications in this corpus.
Search patents in H02N- Granted patents
- 675
- Published applications
- 657
- Assignees
- 239
- Inventors
- 1,436
- Latest grant
- 22 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 1 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 1 | 0 |
| 1981 | 1 | 0 |
| 1982 | 0 | 0 |
| 1983 | 3 | 0 |
| 1984 | 0 | 0 |
| 1985 | 2 | 0 |
| 1986 | 0 | 0 |
| 1987 | 2 | 0 |
| 1988 | 2 | 0 |
| 1989 | 1 | 0 |
| 1990 | 2 | 0 |
| 1991 | 3 | 0 |
| 1992 | 3 | 0 |
| 1993 | 7 | 0 |
| 1994 | 2 | 0 |
| 1995 | 8 | 0 |
| 1996 | 14 | 0 |
| 1997 | 14 | 0 |
| 1998 | 34 | 0 |
| 1999 | 31 | 0 |
| 2000 | 13 | 0 |
| 2001 | 23 | 9 |
| 2002 | 16 | 16 |
| 2003 | 18 | 16 |
| 2004 | 12 | 12 |
| 2005 | 11 | 12 |
| 2006 | 3 | 12 |
| 2007 | 7 | 16 |
| 2008 | 10 | 20 |
| 2009 | 7 | 28 |
| 2010 | 14 | 26 |
| 2011 | 23 | 6 |
| 2012 | 15 | 4 |
| 2013 | 5 | 30 |
| 2014 | 11 | 24 |
| 2015 | 22 | 37 |
| 2016 | 27 | 34 |
| 2017 | 32 | 27 |
| 2018 | 25 | 25 |
| 2019 | 29 | 29 |
| 2020 | 30 | 39 |
| 2021 | 30 | 49 |
| 2022 | 28 | 28 |
| 2023 | 29 | 27 |
| 2024 | 43 | 48 |
| 2025 | 31 | 47 |
| 2026 | 29 | 36 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Electrostatic chuck22 Sep 2026US 12,741,349 B2Samsung Electronics Co., Ltd.
- Programmable soft actuators25 Aug 2026US 12,719,390 B2The Trustees of the University of Pennsylvania
- Cryogenic electrostatic chuck system and method for controlling same25 Aug 2026US 12,721,102 B2Kwangwoon University Industry-Academic Collaboration Foundation
- Electrical feedthrough connector for a substrate support assembly18 Aug 2026US 12,712,327 B2APPLIED Materials.Inc.
- Electrostatic chuck having multi zone gas cooling18 Aug 2026US 12,712,474 B2APPLIED Materials.Inc.
- Electrostatic chuck device24 Sep 2026US 2026/0291408 A1Sumitomo Osaka Cement Co., Ltd.
- Methods of Electrostatic Clutch Sensorization and Performance Measurement24 Sep 2026US 2026/0291409 A1ESTAT Actuation, Inc.
- Apparel with controllable displacement system17 Sep 2026US 2026/0272066 A1NIKE, Inc.
- Electroadhesive film carrier for packaging machines17 Sep 2026US 2026/0280452 A1Krones AG
- Electrostatic chuck and substrate fixing device17 Sep 2026US 2026/0282834 A1Shinko Electric Industries Co., Ltd.
Most cited
By later US patents
- Micromachined silicon electrostatic chuck587US 5,583,736 AThe United States of America as represented by the Department of Energy · 1996
- Susceptors564US 6,160,244 ANGK Insulators, Ltd. · 2000
- Electrostatic chuck and method of attracting wafer562US 5,777,838 AFujitsu Limited · 1998
- Method and apparatus for dry etching and electrostatic chucking device used therein492US 4,384,918 AFujitsu Limited · 1983
- Substrate clamping technique in IC fabrication processes451US 4,184,188 AVeeco Instruments Inc. · 1980