Electrical feedthrough connector for a substrate support assembly

A substrate support assembly for a substrate processing chamber, the substrate support assembly comprising:

• an electrostatic chuck having a plurality of electrodes;
• a utility plate disposed below the electrostatic chuck and comprising a utility channel;
• and
• an electrical feedthrough connector coupled with the electrostatic chuck and the utility plate and configured to provide electrical feedthrough for the plurality of the electrodes,
• wherein the electrical feedthrough connector comprises:
• a first receptacle comprising a first electrical socket;
• an interface body comprising a first side, a second side, and a solid part disposed between the first side and the second side, the first side coupled with the first receptacle, wherein a conductive path is encapsulated in the solid part;
• and
• a second receptacle coupled with the second side of the interface body and comprising a second electrical socket;
• and
• wherein the conductive path is configured to provide electrical connection between the first electrical socket and the second electrical socket.

A method for feeding an electrical signal from an external source to an internal electrode of a processing chamber, the method comprising:

• transmitting an electrical signal from the external source to a first electrical terminal of an electrical feedthrough connector of a substrate support assembly, the processing chamber comprising an internal processing volume and the first electrical terminal being disposed outside of the internal processing volume;
• transmitting the electrical signal from the first electrical terminal to a plurality of first vertical vias embedded in an interface body of the electrical feedthrough connector;
• transmitting the electrical signal from the plurality of first vertical vias to a plurality of horizontal conductive traces encapsulated in the interface body;
• transmitting the electrical signal from the horizontal conductive traces to a plurality of second vertical vias encapsulated in the interface body;
• transmitting the electrical signal from the plurality of the second vertical vias to a second electrical terminal of the electrical feedthrough connector, the first electrical terminal and the second electric terminal being disposed at opposite sides of the interface body;
• and
• transmitting the electrical signal from the second electrical terminal to the internal electrode of the processing chamber, the internal electrode being disposed in the substrate support assembly.