Susceptors
AssigneeNGK Insulators, Ltd.
InventorTsuneaki Ohashi
Life of this patent
Estimating the term…
Abstract
A susceptor comprising a planar heat-conductive layer having a heating surface for heating an object to be heated and a rear surface, a supporting member for supporting the planar heat-conductive layer from a side of the rear surface thereof, first and second heat-choking portions provided between the rear surface of the planar heat-conductive layer and the supporting member in this order, said first heat-choking portion being adapted for restricting a heat flow from the rear surface of the planar heat-conductive layer toward the supporting member, and the second heat-choking portion provided between the first heat-choking portion and the supporting member and adapted for restricting a heat flow from the first heat-choking portion to the supporting member.
Claims24
A susceptor comprising:
- a planar, thermally-conductive substrate having a heating surface for heating an object, a rear surface, and a heat-generating element arranged in said substrate;
- a supporting member for supporting said substrate from the rear surface thereof;
- a first heat-choking portion arranged between said substrate and said supporting member, said first heat-choking portion comprising a back plate, the material of which is selected such that the thermal conductivity thereof is not more than 1/2 that of said substrate, such that heat flow from the rear surface of said substrate towards said supporting member is restricted;
- and
- a second heat-choking portion arranged between said first heat-choking portion and said supporting member and adapted to restrict heat flow from said first heat-choking portion toward said supporting member.
A susceptor comprising:
- a planar, thermally-conductive substrate having a heating surface for heating an object, a rear surface, and a heat-generating element arranged in said substrate;
- a supporting member for supporting said substrate from the rear surface thereof;
- a first heat-choking portion arranged between said substrate and said supporting member, said first heat-choking portion comprising a back plate adapted to restrict heat flow from the rear surface of said substrate towards said supporting member;
- a first joining layer bonding said back plate to said substrate, wherein an area of the rear surface of said substrate is 3 to 300 assuming that the area of said first joining layer is 1;
- and
- a second heat-choking portion arranged between said first heat-choking portion and said supporting member and adapted to restrict heat flow from said first heat-choking portion toward said supporting member.
A susceptor comprising:
- a planar, thermally-conductive substrate having a heating surface for heating an object and a rear surface;
- a supporting member for supporting said substrate from the rear surface thereof;
- a first heat-choking portion arranged between said substrate and said supporting member, said first heat-choking portion being adapted to restrict heat flow from the rear surface of said substrate towards said supporting member;
- a second heat-choking portion arranged between said first heat-choking portion and said supporting member and adapted to restrict heat flow from said first heat-choking portion toward said supporting member;
- wherein all of said substrate, said first heat-choking portion, said second heat-choking portion and said supporting member are electrically conductive, and said supporting member is grounded.
Dependencies are inferred from the claim text.