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US 12,741,349 B2Granted
Electrostatic chuck
AssigneeSamsung Electronics Co., Ltd.
InventorsInseok Seo, Minsung Kim, Dasom Lee, Heewon Min, Dongyun Yeo
Life of this patent
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Abstract
An electrostatic chuck includes a cooling plate having a cooling flow path, an insulating plate disposed on the cooling plate, an upper plate disposed on the insulating plate and fixed to the cooling plate, and a fastening member coupling the cooling plate to the upper plate. The fastening member passes through the cooling plate and is coupled to a fastening portion provided on a lower surface of the upper plate. Movement of the fastening member is constrained only in a first direction intersecting an upper surface of the upper plate.
Claims18
An electrostatic chuck comprising:
- a cooling plate having a cooling flow path;
- an insulating plate disposed on the cooling plate and defining (i) a fastener insertion recess at an upper surface of the insulating plate and (ii) a communication hole extending from the fastener insertion recess and through the insulating plate in a direction intersecting the upper surface of the insulating plate;
- an upper plate disposed above the insulating plate and having a lower surface facing the upper surface of the insulating plate, the upper plate including a fastening portion that extends from the lower surface into the insulating plate and is received at the fastener insertion recess of the insulating plate;
- and
- a fastener coupling the cooling plate to the upper plate with the insulating plate between the cooling plate and the upper plate,
- wherein the fastener passes through the cooling plate and the communication hole of the insulating plate, and has a first end coupled to the fastening portion of the upper plate.
3 more elements
An electrostatic chuck comprising:
- a cooling plate having a cooling flow path;
- an insulating plate disposed on the cooling plate and defining (i) a fastener insertion recess at an upper surface of the insulating plate and (ii) a communication hole extending from the fastener insertion recess and through the insulating plate in a direction intersecting the upper surface of the insulating plate;
- an upper plate disposed above the insulating plate and having a lower surface facing the upper surface of the insulating plate, the upper plate including a fastening portion that extends from the lower surface into the insulating plate and is received at the fastener insertion recess of the insulating plate;
- and
- a fastener coupling the cooling plate to the upper plate with the insulating plate between the cooling plate and the upper plate,
- wherein the insulating plate and the upper plate are spaced apart from each other,
- wherein the upper plate is formed of a ceramic material, and
- wherein the fastener passes through the cooling plate and the communication hole of the insulating plate, and has a first end coupled to the fastening portion of the upper plate.
5 more elements
An electrostatic chuck comprising:
- a cooling plate having a cooling flow path;
- an insulating plate disposed on the cooling plate and defining (i) a fastener insertion recess at an upper surface of the insulating plate and (ii) a communication hole extending from the fastener insertion recess and through the insulating plate in a direction intersecting the upper surface of the insulating plate;
- an upper plate disposed above the insulating plate and having a lower surface facing the upper surface of the insulating plate, the upper plate including a fastening portion that extends from the lower surface into the insulating plate and is received at the fastener insertion recess of the insulating plate, the fastening portion including:
- (1) a body having an internal space and fixedly installed on the lower surface of the upper plate and (2) a coupling member inserted into the internal space of the body;
- and
- a fastener coupling the cooling plate to the coupling member of the upper plate with the insulating plate between the cooling plate and the upper plate,
- wherein the fastener passes through the cooling plate and the communication hole of the insulating plate, and has a first end coupled to the coupling member of the fastening portion,
- wherein the coupling member includes a protrusion to be caught on an inner surface of the body formed to be stepped, and
- wherein a portion disposed below the protrusion of the coupling member is spaced apart from the inner surface of the body by a predetermined distance.
6 more elements
Dependencies are inferred from the claim text.