Electrostatic chuck device

An electrostatic chuck device comprising:

• a plate-shaped electrostatic chucking portion that has a placement surface on which a plate-shaped sample is placed and that has an electrostatic attraction electrode provided therein;
• and
• a base portion that has a disk shape around a central axis and that supports the electrostatic chucking portion from a side opposite to the placement surface on a support surface of the base portion,
• wherein the base portion has
• at least one through-hole that penetrates the base portion in an axial direction of the central axis, and
• a refrigerant channel that is provided inside the base portion and extends along the support surface,
• the refrigerant channel has
• a first channel portion, and
• a second channel portion that is coupled to both ends of the first channel portion,
• the first channel portion is formed on an outer side in a hole diameter direction of the through-hole around the through-hole at an interval from the through-hole,
• the second channel portion is located on both sides of the first channel portion in an extension direction of the refrigerant channel, and
• a channel cross-sectional area of the first channel portion is smaller than a channel cross-sectional area of the second channel portion.