Electrostatic chuck and substrate fixing device
AssigneeShinko Electric Industries Co., Ltd.
InventorsShun Takagi, Hiroshi Ishii
Life of this patent
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Abstract
An electrostatic chuck includes a base body having an upper surface serving as a placement surface for an object to be attracted, an insertion hole formed in the base body and opening to a lower surface of the base, and a columnar ceramic member and a plurality of oxide ceramic particles provided in the insertion hole. The columnar ceramic member has a plurality of holes connecting an upper surface and a lower surface. In plan view, an opening area of each of the holes is smaller than an area of the oxide ceramic particles. Gas can be supplied from the lower surface to the upper surface of the base body via the insertion hole.
Claims11
An electrostatic chuck comprising:
- a base body having an upper surface serving as a placement surface for an object to be attracted;
- an insertion hole formed in the base body and opening to a lower surface of the base body;
- and
- a columnar ceramic member and a plurality of oxide ceramic particles provided in the insertion hole,
- wherein the columnar ceramic member has a plurality of holes connecting an upper surface and a lower surface,
- wherein an opening area of each of the holes is smaller than an area of the oxide ceramic particles in plan view, and
- wherein a gas is to be supplied from the lower surface to the upper surface of the base body via the insertion hole.
Dependencies are inferred from the claim text.