H01S 5/2086
Lateral etch control
Official title: {lateral etch control, e.g. mask induced}
H01S5/2086 (Lateral etch control) appears on 195 US grants and 243 published applications in this corpus.
Search patents in H01S- Granted patents
- 195
- Published applications
- 243
- Assignees
- 124
- Inventors
- 452
- Latest grant
- 5 May 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1981 | 1 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 1 | 0 |
| 1999 | 6 | 0 |
| 2000 | 0 | 0 |
| 2001 | 3 | 0 |
| 2002 | 1 | 12 |
| 2003 | 6 | 2 |
| 2004 | 7 | 12 |
| 2005 | 5 | 11 |
| 2006 | 7 | 5 |
| 2007 | 3 | 3 |
| 2008 | 4 | 10 |
| 2009 | 4 | 10 |
| 2010 | 11 | 10 |
| 2011 | 10 | 10 |
| 2012 | 11 | 10 |
| 2013 | 7 | 5 |
| 2014 | 7 | 6 |
| 2015 | 9 | 7 |
| 2016 | 5 | 3 |
| 2017 | 4 | 13 |
| 2018 | 2 | 11 |
| 2019 | 13 | 12 |
| 2020 | 17 | 12 |
| 2021 | 6 | 21 |
| 2022 | 8 | 9 |
| 2023 | 9 | 16 |
| 2024 | 10 | 14 |
| 2025 | 10 | 11 |
| 2026 | 5 | 8 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
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- Multi-beam semiconductor laser device and method of manufacturing the same27 Jan 2026US 12,537,365 B2Ushio Denki Kabushiki Kaisha
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- Suspended active photonic devices2 Jul 2026US 2026/0188978 A1Sivers Photonics Limited
- Method for manufacturing semiconductor device28 May 2026US 2026/0149235 A1Mitsubishi Electric Corporation
- Semiconductor optical integrated device and method of manufacturing semiconductor optical integrated device21 May 2026US 2026/0142439 A1Mitsubishi Electric Corporation
- Vertical cavity surface emitting laser (vcsel) emitter with guided-antiguided waveguide26 Feb 2026US 2026/0058441 A1
- Optoelectronic device and method of manufacture of via-first metallization scheme5 Feb 2026US 2026/0039089 A1Celestial AI Inc.
Most cited
By later US patents
- Self-aligned multi-dielectric-layer lift off process for laser diode stripes231US 8,143,148 B1Soraa, Inc. · 2012
- Near planar native-oxide VCSEL devices and arrays using converging oxide ringlets102US 5,896,408 AHewlett-Packard Company · 1999
- Method of making a vertical cavity laser55US 5,877,038 AThe Regents of the University of California · 1999
- Semiconductor optical devices36US 5,459,747 AMitsubishi Denki Kabushiki Kaisha · 1995
- Fabrication method of polarization-controlled surface-emitting laser diode using tilted-cavity32US 5,712,188 AElectronics and Telecommunications Research Institute · 1998