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US 2026/0058441 A1Published application
Vertical cavity surface emitting laser (vcsel) emitter with guided-antiguided waveguide
OwnerEvgeny Zibik, Antoine Pissis +1inventors
InventorsEvgeny Zibik, Antoine Pissis, Stefano Tirelli
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Abstract
A vertical cavity surface emitting laser (VCSEL) device comprising a VCSEL emitter having a waveguide with a guided portion and an antiguided portion is disclosed. The guided and antiguided portions may select and confine a mode of the VCSEL emitter. The antiguided portion may also be used to coherently couple adjacent VCSEL emitters.
Claims20
A semiconductor device, comprising:
- an upper mirror;
- a lower mirror;
- and
- an active region and vertical cavity between the upper mirror and the lower mirror;
- wherein the vertical cavity defines a waveguide comprising a guided portion and an antiguided portion between the upper mirror and the lower mirror;
- wherein the active region is positioned vertically between the guided portion and the antiguided portion;
- and
- wherein the guide portion and the antiguided portion provide current confinement for a current passing through the active region.
5 more elements
A semiconductor device, comprising:
- an array of VCSEL emitters;
- wherein each VCSEL emitter of the array of VCSEL emitters comprises:
- an upper mirror;
- a lower mirror;
- and
- an active region and vertical cavity between the upper mirror and the lower mirror;
- and
- wherein the vertical cavity defines a waveguide comprising a guided portion between the active region and the upper mirror and an antiguided portion between the active region and the lower mirror;
- and
- wherein the guide portion and the antiguide portion provide current confinement for current flow through the respective VCSEL emitter.
7 more elements
A method of forming a VCSEL emitter, the method comprising:
- forming a first current confining aperture of the VCSEL emitter over a lower mirror of the VCSEL emitter;
- forming an active region of the VCSEL emitter over the first current confining aperture of the VCSEL emitter;
- forming a second current confining aperture of the VCSEL emitter over the active region;
- and
- forming an upper mirror of the VCSEL emitter over the second current confining aperture;
- and
- wherein forming the first current confining aperture and forming the second current confining aperture define a guided portion and an antiguided portion of a vertical cavity between the upper mirror and the lower mirror.
4 more elements
Dependencies are inferred from the claim text.