Self-aligned multi-dielectric-layer lift off process for laser diode stripes

A method for forming a laser diode, comprising:

• providing a laser diode material structure, including an under clad layer, an upper clad layer and an active layer sandwiched between the under clad layer and the upper clad layer, the upper clad layer having a surface region;
• depositing a multilayer dielectric stack overlying the surface region, the multilayer dielectric stack comprising alternating layers of at least a first dielectric layer and a second dielectric layer;
• selectively removing a portion of the multilayer dielectric stack to form a dielectric mask structure using a pattern and etching process;
• removing a portion of the upper clad layer using the dielectric mask structure as a mask,
• forming a laser diode structure, the laser diode structure having an exposed sidewall region and a top region while maintaining the dielectric mask structure substantially intact;
• selectively removing a portion of at least the first dielectric layers to form an undercut region between second dielectric layers;
• depositing at least one passivation layer overlying a first surface region of the upper clad layer, the exposed sidewall region, and the dielectric mask structure, while maintaining the undercut region;
• removing the dielectric mask structure using a selective etch process, the undercut region allowing the selective etch process to occur in a lateral direction;
• exposing a top surface region;
• and
• forming a contact structure overlying at least the top surface region.