H01S 5/2081
Using special etching techniques
Official title: {using special etching techniques}
H01S5/2081 (Using special etching techniques) appears on 585 US grants and 549 published applications in this corpus.
Search patents in H01S- Granted patents
- 585
- Published applications
- 549
- Assignees
- 235
- Inventors
- 1,187
- Latest grant
- 4 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1981 | 1 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 1 | 0 |
| 1987 | 3 | 0 |
| 1988 | 3 | 0 |
| 1989 | 3 | 0 |
| 1990 | 2 | 0 |
| 1991 | 3 | 0 |
| 1992 | 7 | 0 |
| 1993 | 7 | 0 |
| 1994 | 8 | 0 |
| 1995 | 17 | 0 |
| 1996 | 13 | 0 |
| 1997 | 13 | 0 |
| 1998 | 22 | 0 |
| 1999 | 19 | 0 |
| 2000 | 16 | 0 |
| 2001 | 13 | 6 |
| 2002 | 11 | 44 |
| 2003 | 32 | 27 |
| 2004 | 26 | 37 |
| 2005 | 16 | 27 |
| 2006 | 27 | 16 |
| 2007 | 14 | 13 |
| 2008 | 15 | 25 |
| 2009 | 16 | 21 |
| 2010 | 25 | 18 |
| 2011 | 19 | 18 |
| 2012 | 15 | 16 |
| 2013 | 15 | 20 |
| 2014 | 18 | 11 |
| 2015 | 19 | 12 |
| 2016 | 9 | 11 |
| 2017 | 10 | 25 |
| 2018 | 6 | 24 |
| 2019 | 28 | 20 |
| 2020 | 26 | 19 |
| 2021 | 11 | 31 |
| 2022 | 14 | 21 |
| 2023 | 17 | 33 |
| 2024 | 21 | 21 |
| 2025 | 17 | 20 |
| 2026 | 7 | 13 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Self-aligned ridge waveguide laser structure, method for fabrication, and method for use with interposer-based pics4 Aug 2026US 12,699,331 B2
- Apparatus for generating laser radiation with a lateral current injection laser arrangement and a cavity, and method for manufacturing the same30 Jun 2026US 12,671,230 B2Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
- Semiconductor laser element and method of producing semiconductor laser element5 May 2026US 12,620,770 B2Sony Group Corporation
- Light-emitting element array and method of producing light-emitting element array17 Feb 2026US 12,555,981 B2Sony Semiconductor Solutions Corporation
- High-reliability low-defect semiconductor light-emitting device and method for manufacturing same3 Feb 2026US 12,542,416 B2Everbright Institute of Semiconductor Photonics Co., Ltd.
- Oxide aperture shaping in vertical cavity surface-emitting laser10 Sep 2026US 2026/0269569 A1II-Vi Delaware, Inc.
- Surface-emitting element20 Aug 2026US 2026/0246234 A1Sony Semiconductor Solutions Corporation
- Suspended active photonic devices2 Jul 2026US 2026/0188978 A1Sivers Photonics Limited
- Method for manufacturing semiconductor device28 May 2026US 2026/0149235 A1Mitsubishi Electric Corporation
- Circular beam telecommunications wavelength edge-emitting semiconductor laser28 May 2026US 2026/0149239 A1University of Notre Dame du Lac
Most cited
By later US patents
- Self-aligned multi-dielectric-layer lift off process for laser diode stripes231US 8,143,148 B1Soraa, Inc. · 2012
- Highly compact vertical cavity surface emitting lasers114US 5,978,408 AXerox Corporation · 1999
- Near planar native-oxide VCSEL devices and arrays using converging oxide ringlets102US 5,896,408 AHewlett-Packard Company · 1999
- Process for fabricating a semiconductor device96US 4,857,477 AOki Electric Industry Co., Ltd. · 1989
- Transverse mode and polarization control of surface emitting lasers through the formation of a dielectric stack96US 6,885,690 B2Zarlink Semiconductor Inc. · 2005