H01S 5/209
Special etch stop layers
Official title: {special etch stop layers}
H01S5/209 (Special etch stop layers) appears on 219 US grants and 182 published applications in this corpus.
Search patents in H01S- Granted patents
- 219
- Published applications
- 182
- Assignees
- 106
- Inventors
- 521
- Latest grant
- 4 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1989 | 1 | 0 |
| 1990 | 1 | 0 |
| 1991 | 2 | 0 |
| 1992 | 5 | 0 |
| 1993 | 3 | 0 |
| 1994 | 5 | 0 |
| 1995 | 12 | 0 |
| 1996 | 8 | 0 |
| 1997 | 5 | 0 |
| 1998 | 13 | 0 |
| 1999 | 9 | 0 |
| 2000 | 10 | 0 |
| 2001 | 3 | 4 |
| 2002 | 4 | 16 |
| 2003 | 12 | 12 |
| 2004 | 9 | 12 |
| 2005 | 6 | 4 |
| 2006 | 10 | 4 |
| 2007 | 4 | 9 |
| 2008 | 4 | 9 |
| 2009 | 7 | 7 |
| 2010 | 9 | 7 |
| 2011 | 7 | 5 |
| 2012 | 1 | 5 |
| 2013 | 6 | 12 |
| 2014 | 9 | 5 |
| 2015 | 10 | 6 |
| 2016 | 3 | 7 |
| 2017 | 6 | 6 |
| 2018 | 2 | 2 |
| 2019 | 5 | 6 |
| 2020 | 7 | 5 |
| 2021 | 3 | 4 |
| 2022 | 2 | 11 |
| 2023 | 4 | 10 |
| 2024 | 6 | 4 |
| 2025 | 4 | 7 |
| 2026 | 2 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
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Most cited
By later US patents
- Transverse mode and polarization control of surface emitting lasers through the formation of a dielectric stack96US 6,885,690 B2Zarlink Semiconductor Inc. · 2005
- Top emitting VCSEL with etch stop layer83US 5,293,392 AMotorola, Inc. · 1994
- Patterned mirror VCSEL with adjustable selective etch region56US 5,557,626 AMotorola, Inc. · 1996
- Semiconductor light-emitting device with compound semiconductor layer55US 5,488,233 AKabushiki Kaisha Toshiba · 1996
- Optical device, surface emitting type device and method for manufacturing the same42US 6,720,583 B2Kabushiki Kaisha Toshiba · 2004