Vertical cavity surface emitting laser and method for producing same
AssigneeTrumpf Photonic Components GmbH
InventorsRoman Koerner, Daniela Stange
Life of this patent
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Abstract
A vertical-cavity surface-emitting laser includes a first reflector connected to a first semiconductor substrate, a second reflector, and an active region including a quantum well structure for emitting light. The active region is located in series between the first reflector and the second reflector. The first reflector is located in series between the first semiconductor substrate and the active region. A surface of an outer face of the first semiconductor substrate that faces away from the first reflector has an orientation mark that is configured so as to define a position of the vertical-cavity surface-emitting laser in a plane in parallel with the outer face of the first semiconductor substrate.
Claims11
A vertical-cavity surface-emitting laser comprising:
- a first reflector connected to a first semiconductor substrate,
- a second reflector, and
- an active region comprising a quantum well structure for emitting light, wherein the active region is located in series between the first reflector and the second reflector, wherein the first reflector is located in series between the first semiconductor substrate and the active region,
- wherein a surface of an outer face of the first semiconductor substrate that faces away from the first reflector has an orientation mark that is configured so as to define a position of the vertical-cavity surface-emitting laser in a plane in parallel with the outer face of the first semiconductor substrate.
A method for producing a vertical-cavity surface-emitting laser, the vertical-cavity surface-emitting laser comprising a first semiconductor substrate, a first reflector, a second reflector and an active region with a quantum well structure for generating light, wherein the active region is arranged in series between the first reflector and the second reflector, the method comprising:
- a) providing the first semiconductor substrate, on which the first reflector is produced;
- b) providing a second semiconductor substrate, on which the second reflector is produced;
- c) providing a third semiconductor substrate, and epitaxial growing the active region with the quantum well structure on the third semiconductor substrate;
- d) connecting the first reflector to the active region;
- e) removing the third semiconductor substrate;
- f) connecting the second reflector to the active region;
- g) removing the second semiconductor substrate;
- and
- prior to step f), producing an orientation mark on a surface of an outer face of the first semiconductor substrate facing away from the first reflector, wherein the orientation mark is configured so as to define a position of the vertical-cavity surface-emitting laser in a plane in parallel with the outer face of the first semiconductor substrate.
Dependencies are inferred from the claim text.