Optical device, surface emitting type device and method for manufacturing the same
AssigneeKabushiki Kaisha Toshiba
InventorsShin-Ya Nunoue, Masayuki Ishikawa
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Abstract
The present invention provides an optical device and a surface emitting type device which have high efficiency and a stable operation and are manufactured at high manufacturing yield. The optical device and the surface emitting type device are characterized in that they have a distributed Bragg reflector (DBR) including a plurality of semiconductor layers made of a nitride semiconductor with substantially same gaps therbetween. Further, the optical device and the surface emitting type device are characterized in that they have a distributed Bragg reflector (DBR) in which a plurality of semiconductor layers made of nitride semiconductor and a plurality of organic layers made of organic material are alternately laminated.
Claims7
An optical device comprising a reflector for reflecting light having a wavelength of λ, said reflector including:
- a laminated layer having a plurality of semiconductor layers with substantially the same interval gaps therebetween, each of said semiconductor layers being made of a first nitride semiconductor containing aluminum which has a refractive index of n1 and having a film thickness of substantially λ/4n1;
- and
- support parts being interposed between the neighboring semiconductor layers to support said semiconductor layers, each of said support parts being made of a second nitride semiconductor and having a film thickness of substantially λ/4, said second nitride semiconductor having a lower content of aluminum than said first nitride semiconductor, the content of aluminum in said nitride semiconductor including zero.
A surface emitting optical device comprising:
- an active layer emitting light having a wavelength of(ë)λ;
- and a reflector for reflecting the light emitted from said active layer, said reflector including etc.
Dependencies are inferred from the claim text.