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US 5,293,392 AGranted
Top emitting VCSEL with etch stop layer
AssigneeMotorola, Inc.
InventorsChan-Long Shieh, Donald E. Ackley
Life of this patent
Estimating the term…
Abstract
A top emitting vertical cavity surface emitting laser with an etch stop layer positioned in the top mirror stack so the stack can be etched to form a trench surrounding a mesa with the emitting area on the mesa and the trench confining current flow and lasing to the mesa.
Claims26
A method of producing a top emitting vertical cavity surface emitting laser including the steps of:
- providing a substrate having a major surface;
- forming a first parallel mirror stack on the major surface of the substrate and parallel therewith;
- forming an active and spacer layer on the first parallel mirror stack;
- forming a second parallel mirror stack on the active and spacer layer with an emitting surface and a layer of etch stop material positioned within the second parallel mirror stack a predetermined distance from the emitting surface and parallel therewith;
- and
- etching a portion of the second parallel mirror stack from the emitting surface to approximately an upper surface of the etch stop layer to define an emitting area.
3 more elements
In a top emitting vertical cavity surface emitting laser comprising:
- an active and spacer layer having first and second opposed major surfaces;
- a first parallel mirror stack affixed to and parallel with the first major surface and a second parallel mirror stack affixed to and parallel with the second major surface and defining an emitting surface on the second parallel mirror stack opposite the major surface;
- a layer of etch stop material positioned within the second parallel mirror stack a predetermined distance from the emitting surface and parallel therewith;
- a portion of the second parallel mirror stack being etched from the emitting surface to approximately an upper surface of the etch stop layer with a remaining portion of the second parallel mirror stack defining an emitting area in the emitting surface;
- and
- the remaining portion of the second parallel mirror stack being sufficient to promote lasing therein and the etched portion of the second parallel mirror stack being insufficient to promote lasing therein.
3 more elements
Dependencies are inferred from the claim text.