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US 12,671,230 B2Granted
Apparatus for generating laser radiation with a lateral current injection laser arrangement and a cavity, and method for manufacturing the same
AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
InventorsJan Gregor Gatzmann, Martin Möhrle
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Abstract
Embodiments of the present invention include an apparatus for generating laser radiation with a semiconductor substrate, an intermediate layer arranged on the semiconductor substrate, and a Lateral Current Injection (LCI) laser arrangement arranged on the intermediate layer, wherein the intermediate layer includes a cavity extending at least under a laser strip of the LCI laser arrangement.
Claims9
An apparatus for generating laser radiation, comprising:
- a semiconductor substrate,
- an intermediate layer arranged on the semiconductor substrate;
- and
- a Lateral Current Injection (LCI) laser arrangement arranged on the intermediate layer,
- wherein the intermediate layer comprises a cavity extending at least under a laser strip of the LCI laser arrangement;
- wherein the LCI laser arrangement comprises a first area with a first doping, and
- wherein the LCI laser arrangement comprises a second area with a second doping,
- wherein the first and the second doping are different;
- and
- wherein the laser strip of the LCI laser arrangement is arranged laterally between the first area and the second area of the LCI laser arrangement, and
- wherein the laser strip is configured to generate the laser radiation on the basis of a current that is laterally fed in by means of the first and second areas;
- and
- wherein the LCI laser arrangement comprises at least one tunnel structure,
- wherein the at least one tunnel structure is arranged in the first and/or the second area of the LCI laser arrangement;
- and
- wherein the at least one tunnel structure extends from the cavity in the intermediate layer up to the surface, opposite the intermediate layer, of the LCI laser arrangement;
- wherein the apparatus comprises a first contacting and a second contacting,
- wherein the first contacting is arranged on the first area of the LCI laser arrangement, and
- wherein the first contacting is configured to enable an electrical contact to the first area of the LCI laser arrangement, and
- wherein the second contacting is arranged on the second area of the LCI laser arrangement, and
- wherein the second contacting is configured to enable an electrical contact to the second area of the LCI laser arrangement;
- and
- wherein the first contacting is arranged laterally between the tunnel structure and the laser strip of the LCI laser arrangement;
- and/or
- wherein the second contacting is arranged laterally between the tunnel structure and the laser strip of the LCI laser arrangement.
22 more elements
Dependencies are inferred from the claim text.