Oxide aperture shaping in vertical cavity surface-emitting laser
AssigneeII-Vi Delaware, Inc.
InventorsMirko Hoser, Abram Jakubowicz, Tomi Leinonen
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Abstract
A mesa structure for a VCSEL device is particularly configured to compensate for variations in the shape of the created oxide aperture that result from anisotropic oxidation. In particular, a suitable mesa shape is derived by determining the shape of an as-created aperture formed by oxidizing a circular mesa structure, and then ascertaining the compensation required to convert the as-created shape into a desired (“target”) shaped aperture opening. The compensation value is then used to modify the shape of the mesa itself such that a following anisotropic oxidation yields a target-shaped oxide aperture.
Claims5
A vertical cavity surface emitting laser (VCSEL) comprising:
- a substrate having a top major surface;
- a first distributed Bragg reflector (DBR) formed on the top major surface of the substrate, the first distributed Bragg reflector comprising a stack of layers of alternating refractive index value;
- a second DBR disposed over the first DBR and comprising a stack of layers of alternating refractive index, the second DBR including a mesa structure of a predetermined cross-section geometry;
- an active layer disposed between the first DBR and the second DBR;
- and
- an aperture layer including an interior oxide aperture region created by anisotropic oxidation, the interior oxide aperture exhibiting a defined cross-section based on the predetermined cross-section geometry of the mesa structure.
Dependencies are inferred from the claim text.