H01S 3/225
Comprising an excimer or exciplex
Official title: comprising an excimer or exciplex
H01S3/225 (Comprising an excimer or exciplex) appears on 923 US grants and 830 published applications in this corpus.
Search patents in H01S- Granted patents
- 923
- Published applications
- 830
- Assignees
- 191
- Inventors
- 1,065
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 3 | 0 |
| 1978 | 1 | 0 |
| 1979 | 2 | 0 |
| 1980 | 5 | 0 |
| 1981 | 10 | 0 |
| 1982 | 4 | 0 |
| 1983 | 1 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 7 | 0 |
| 1987 | 10 | 0 |
| 1988 | 5 | 0 |
| 1989 | 9 | 0 |
| 1990 | 11 | 0 |
| 1991 | 16 | 0 |
| 1992 | 10 | 0 |
| 1993 | 10 | 0 |
| 1994 | 10 | 0 |
| 1995 | 9 | 0 |
| 1996 | 3 | 0 |
| 1997 | 5 | 0 |
| 1998 | 14 | 0 |
| 1999 | 21 | 0 |
| 2000 | 33 | 0 |
| 2001 | 37 | 24 |
| 2002 | 53 | 91 |
| 2003 | 73 | 36 |
| 2004 | 69 | 44 |
| 2005 | 34 | 32 |
| 2006 | 33 | 20 |
| 2007 | 27 | 29 |
| 2008 | 15 | 33 |
| 2009 | 10 | 11 |
| 2010 | 31 | 17 |
| 2011 | 16 | 15 |
| 2012 | 13 | 14 |
| 2013 | 12 | 26 |
| 2014 | 18 | 8 |
| 2015 | 15 | 17 |
| 2016 | 16 | 17 |
| 2017 | 24 | 30 |
| 2018 | 31 | 47 |
| 2019 | 21 | 29 |
| 2020 | 18 | 35 |
| 2021 | 23 | 32 |
| 2022 | 17 | 43 |
| 2023 | 28 | 44 |
| 2024 | 33 | 43 |
| 2025 | 38 | 56 |
| 2026 | 19 | 37 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- H01S 3/2251Arf, i.e. argon fluoride is comprised for lasing around 193 nm185
- H01S 3/2256Krf, i.e. krypton fluoride is comprised for lasing around 248 nm121
- H01S 3/2258F2, i.e. molecular fluoride is comprised for lasing around 157 nm112
- H01S 3/2255Xef, i.e. xenon fluoride is comprised for lasing around 351 nm16
- H01S 3/2253Xecl, i.e. xenon chloride is comprised for lasing around 308 nm15
Recent patents
- Electronic device manufacturing method and lithography control processor8 Sep 2026US 12,730,385 B2Gigaphoton Inc.
- Optical pulse stretcher, laser apparatus, and electronic device manufacturing method30 Jun 2026US 12,671,220 B2Gigaphoton Inc.
- Ultraviolet laser device and electronic device manufacturing method30 Jun 2026US 12,671,221 B2Gigaphoton Inc.
- Excimer laser with improved beam uniformity and stability16 Jun 2026US 12,658,666 B2Coherent LaserSystems GmbH & Co. KG
- Laser apparatus, pulse width stretching apparatus, and electronic device manufacturing method2 Jun 2026US 12,646,900 B2Gigaphoton Inc.
- Apparatus and method for acoustic control in a laser chamber20 Aug 2026US 2026/0246220 A1Cymer, Inc.
- Solid-state laser system and excimer laser apparatus20 Aug 2026US 2026/0246223 A1Gigaphoton Inc.
- Combined laser sources for sample characterization13 Aug 2026US 2026/0235527 A1KLA Corporation
- Laser chamber preionizer having acoustic scattering surface13 Aug 2026US 2026/0237956 A1Cymer, Inc.
- Excimer laser apparatus and electronic device manufacturing method30 Jul 2026US 2026/0221711 A1Gigaphoton Inc.
Most cited
By later US patents
- Reliable modular production quality narrow-band high REP rate excimer laser171US 6,128,323 ACymer, Inc. · 2000
- Compact excimer laser including an electrode mounted in insulating relationship to wall of the laser162US 4,959,840 ACymer Laser Technologies · 1990
- Reliable, modular, production quality narrow-band high rep rate F.sub.2 laser160US 6,018,537 ACymer, Inc. · 2000
- Pulse power generating circuit with energy recovery157US 5,729,562 AAdvanced Pulse Power Technologies, Inc. · 1998
- Wavelength system for an excimer laser146US 5,978,394 ACymer, Inc. · 1999