Optical pulse stretcher, laser apparatus, and electronic device manufacturing method
AssigneesGigaphoton Inc., Inter-University Research Institute Corporation National Institutes of Natural Sciences
InventorsYuki Tamaru, Taisuke Miura, Ryo Yasuhara
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Abstract
An optical pulse stretcher that stretches a pulse width of a pulse laser beam includes a polarizer configured to separate a component in a specific polarization direction of the pulse laser beam that has entered, a delay optical system including a plurality of mirrors through which the pulse laser beam reflected by or transmitted through the polarizer is propagated; and a first Faraday rotator that includes a first magnet and a first Faraday material and is disposed on an optical path of the delay optical system to rotate a polarization direction of the pulse laser beam.
Claims20
An optical pulse stretcher that stretches a pulse width of a pulse laser beam, the optical pulse stretcher comprising:
- a polarizer configured to separate a component in a specific polarization direction of the pulse laser beam that has entered;
- a delay optical system including a plurality of mirrors that are configured such that the pulse laser beam reflected by or transmitted through the polarizer passes through a delay optical path, through which the pulse laser beam is propagated to return to the polarizer, a plurality of times;
- and
- a first Faraday rotator that includes a first magnet and a first Faraday material and is disposed on the delay optical path of the delay optical system to rotate a polarization direction of the pulse laser beam.
A laser apparatus comprising:
- an oscillator configured to output a pulse laser beam;
- and
- an optical pulse stretcher configured to stretch a pulse width of the pulse laser beam,
- the optical pulse stretcher including
- a polarizer configured to separate a component in a specific polarization direction of the pulse laser beam that has entered,
- a delay optical system including a plurality of mirrors that are configured such that the pulse laser beam reflected by or transmitted through the polarizer passes through a delay optical path, through which the pulse laser beam is propagated to return to the polarizer, a plurality of times;
- and
- a first Faraday rotator that includes a first magnet and a first Faraday material and is disposed on the delay optical path of the delay optical system to rotate a polarization direction of the pulse laser beam.
An electronic device manufacturing method comprising:
- generating a laser beam having a stretched pulse width with a laser apparatus, the laser apparatus including
- an oscillator configured to output a pulse laser beam, and
- an optical pulse stretcher configured to stretch a pulse width of the pulse laser beam, the optical pulse stretcher including
- a polarizer configured to separate a component in a specific polarization direction of the pulse laser beam that has entered,
- a delay optical system including a plurality of mirrors that are configured such that the pulse laser beam reflected by or transmitted through the polarizer passes through a delay optical path, through which the pulse laser beam is propagated to return to the polarizer, a plurality of times;
- and
- a first Faraday rotator that includes a first magnet and a first Faraday material and is disposed on the delay optical path of the delay optical system to rotate a polarization direction of the pulse laser beam;
- outputting the laser beam to an exposure apparatus;
- and
- exposing a photosensitive substrate to the laser beam in the exposure apparatus to manufacture an electronic device.
Dependencies are inferred from the claim text.