Ultraviolet laser device and electronic device manufacturing method

An ultraviolet laser device comprising:

• an oscillation stage laser configured to output linearly polarized pulse laser light having an ultraviolet wavelength;
• an amplifier including an optical resonator, and configured to amplify and output the pulse laser light;
• an optical isolator arranged on an optical path between the oscillation stage laser and the amplifier;
• and
• a processor,
• the optical isolator including:
• a first polarizer arranged so that the pulse laser light output from the oscillation stage laser is transmitted therethrough;
• a first Faraday rotator including a first magnet and a first Faraday material, and configured to rotate a polarization direction of the pulse laser light transmitted through the first polarizer in a first rotation direction;
• a first actuator configured to relatively move the first magnet and the first Faraday material in an optical axis direction of the pulse laser light;
• and
• a first sensor configured to measure a power of light reflected by the first polarizer among light returning from the amplifier to the oscillation stage laser, and
• the processor controlling the first actuator based on a measurement result of the first third sensor.

An ultraviolet laser device comprising:

• an oscillation stage laser configured to output linearly polarized pulse laser light having an ultraviolet wavelength;
• an amplifier including an optical resonator, and configured to amplify and output the pulse laser light;
• an optical isolator arranged on an optical path between the oscillation stage laser and the amplifier;
• a beam splitter arranged on an optical path between the oscillation stage laser and the optical isolator;
• a first sensor configured to measure a power of light reflected by the beam splitter;
• and
• a processor,
• the optical isolator including:
• a first polarizer arranged so that the pulse laser light output from the oscillation stage laser is transmitted therethrough;
• a first Faraday rotator including a first magnet and a first Faraday material, and configured to rotate a polarization direction of the pulse laser light transmitted through the first polarizer in a first rotation direction;
• and
• a first actuator configured to relatively move the first magnet and the first Faraday material in an optical axis direction of the pulse laser light;
• and
• the processor controlling the first actuator based on a measurement result of the first sensor.

An electronic device manufacturing method, comprising:

• generating laser light amplified by an amplifier using an ultraviolet laser device;
• outputting the amplified laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture an electronic device,
• the ultraviolet laser device including:
• an oscillation stage laser configured to output linearly polarized pulse laser light having an ultraviolet wavelength;
• the amplifier including an optical resonator, and configured to amplify and output the pulse laser light;
• an optical isolator arranged on an optical path between the oscillation stage laser and the amplifier;
• and
• a processor,
• the optical isolator including:
• a first polarizer arranged so that the pulse laser light output from the oscillation stage laser is transmitted therethrough;
• a first Faraday rotator including a first magnet and a first Faraday material, and configured to rotate a polarization direction of the pulse laser light transmitted through the first polarizer in a first rotation direction;
• a second polarizer arranged so that the pulse laser light output from the first Faraday rotator is transmitted therethrough;
• a first actuator configured to relatively move the first magnet and the first Faraday material in an optical axis direction of the pulse laser light;
• and
• a first sensor configured to measure a power of pulse laser light reflected by the second polarizer among the pulse laser light output from the oscillation stage laser;
• and
• the processor controlling the first actuator based on a measurement result of the first sensor.

An electronic device manufacturing method, comprising:

• generating laser light amplified by an amplifier using an ultraviolet laser device;
• outputting the amplified laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture an electronic device,
• the ultraviolet laser device including:
• an oscillation stage laser configured to output linearly polarized pulse laser light having an ultraviolet wavelength;
• the amplifier including an optical resonator, and configured to amplify and output the pulse laser light;
• an optical isolator arranged on an optical path between the oscillation stage laser and the amplifier;
• and
• a processor,
• the optical isolator including:
• a first polarizer arranged so that the pulse laser light output from the oscillation stage laser is transmitted therethrough;
• a first Faraday rotator including a first magnet and a first Faraday material, and configured to rotate a polarization direction of the pulse laser light transmitted through the first polarizer in a first rotation direction;
• a first actuator configured to relatively move the first magnet and the first Faraday material in an optical axis direction of the pulse laser light;
• and
• a first sensor configured to measure a power of light reflected by the first polarizer among light returning from the amplifier to the oscillation stage laser, and
• the processor controlling the first actuator based on a measurement result of the first sensor.