Pulse power generating circuit with energy recovery
AssigneesCymer, Inc., Advanced Pulse Power Technologies, Inc.
InventorsDaniel L. Birx, Palash P. Das, Igor V. Fomenkov, William N. Partlo, Tom A. Watson
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AssigneesCymer, Inc., Advanced Pulse Power Technologies, Inc.
InventorsDaniel L. Birx, Palash P. Das, Igor V. Fomenkov, William N. Partlo, Tom A. Watson
Estimating the term…
A high voltage pulse power generating circuit capable of providing energy recovery is disclosed. The energy efficient pulse generating circuit source comprises a high voltage charge storing element which is periodically discharged into a compressor circuit. An energy recovery circuit coupled to the compressor circuit reverses the polarity of energy dissipated by the pulse power generating circuit and transfers the waste energy back to the power source. In a preferred embodiment, the pulse power generating circuit of the present invention utilizes an SCR switch for periodically discharging the charge storing element. This embodiment of the present invention provides pulses consistently and will not provide even a single missed pulse.
A pulse power generating circuit comprising:
A method of generating pulse power, comprising the steps of:
A high-voltage pulse power laser system, comprising:
A high voltage pulse power laser system comprising:
A method of recovering energy in a laser system, comprising the steps of:
A high voltage pulse power laser system comprising:
Dependencies are inferred from the claim text.