H01S 3/2251
Arf, i.e. argon fluoride is comprised for lasing around 193 nm
Official title: {ArF, i.e. argon fluoride is comprised for lasing around 193 nm}
H01S3/2251 (Arf, i.e. argon fluoride is comprised for lasing around 193 nm) appears on 185 US grants and 215 published applications in this corpus.
Search patents in H01S- Granted patents
- 185
- Published applications
- 215
- Assignees
- 29
- Inventors
- 277
- Latest grant
- 2 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1998 | 1 | 0 |
| 1999 | 2 | 0 |
| 2000 | 6 | 0 |
| 2001 | 4 | 2 |
| 2002 | 1 | 15 |
| 2003 | 9 | 8 |
| 2004 | 12 | 13 |
| 2005 | 9 | 9 |
| 2006 | 9 | 7 |
| 2007 | 7 | 1 |
| 2008 | 5 | 13 |
| 2009 | 5 | 0 |
| 2010 | 9 | 5 |
| 2011 | 5 | 5 |
| 2012 | 4 | 6 |
| 2013 | 5 | 12 |
| 2014 | 7 | 2 |
| 2015 | 7 | 11 |
| 2016 | 7 | 4 |
| 2017 | 8 | 10 |
| 2018 | 9 | 9 |
| 2019 | 2 | 10 |
| 2020 | 5 | 11 |
| 2021 | 9 | 10 |
| 2022 | 9 | 13 |
| 2023 | 6 | 9 |
| 2024 | 8 | 2 |
| 2025 | 10 | 15 |
| 2026 | 5 | 13 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
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Most cited
By later US patents
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