Predictive control of a pulsed light beam
AssigneeCymer, Inc.
InventorKuo-Tai Teng
Life of this patent
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AssigneeCymer, Inc.
InventorKuo-Tai Teng
Estimating the term…
In some general aspects, a light beam control apparatus includes: a spectral feature actuator associated with a set of different states, each state configured to cause an optical apparatus to generate one or more pulses of a light beam at a discrete value of a spectral feature of the light beam; and a controller in communication with the spectral feature actuator. The controller includes: an actuator drive module configured to cause the spectral feature actuator to transition among the set of different states according to a control waveform; a waveform module configured to compute the control waveform for the spectral feature actuator that governs the transition among the set of discrete values; and a predictive module configured to receive one or more sensed aspects of the spectral feature actuator and instruct the waveform module to adjust the control waveform based on the received sensed aspects.
A light beam control apparatus comprising:
A method comprising:
Dependencies are inferred from the claim text.