H01S 3/223
The active gas being polyatomic, i.e. containing two or more atoms
Official title: the active gas being polyatomic, i.e. containing two or more atoms (H01S3/227 takes precedence)
H01S3/223 (The active gas being polyatomic, i.e. containing two or more atoms) appears on 1,405 US grants and 1,253 published applications in this corpus.
Search patents in H01S- Granted patents
- 1,405
- Published applications
- 1,253
- Assignees
- 340
- Inventors
- 1,778
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 4 | 0 |
| 1977 | 12 | 0 |
| 1978 | 7 | 0 |
| 1979 | 10 | 0 |
| 1980 | 15 | 0 |
| 1981 | 14 | 0 |
| 1982 | 9 | 0 |
| 1983 | 5 | 0 |
| 1984 | 2 | 0 |
| 1985 | 3 | 0 |
| 1986 | 14 | 0 |
| 1987 | 12 | 0 |
| 1988 | 9 | 0 |
| 1989 | 16 | 0 |
| 1990 | 13 | 0 |
| 1991 | 19 | 0 |
| 1992 | 12 | 0 |
| 1993 | 11 | 0 |
| 1994 | 15 | 0 |
| 1995 | 15 | 0 |
| 1996 | 6 | 0 |
| 1997 | 7 | 0 |
| 1998 | 21 | 0 |
| 1999 | 23 | 0 |
| 2000 | 36 | 0 |
| 2001 | 39 | 27 |
| 2002 | 57 | 101 |
| 2003 | 82 | 47 |
| 2004 | 78 | 53 |
| 2005 | 42 | 43 |
| 2006 | 45 | 28 |
| 2007 | 34 | 42 |
| 2008 | 23 | 48 |
| 2009 | 20 | 26 |
| 2010 | 43 | 32 |
| 2011 | 29 | 29 |
| 2012 | 27 | 37 |
| 2013 | 29 | 54 |
| 2014 | 45 | 47 |
| 2015 | 41 | 46 |
| 2016 | 50 | 47 |
| 2017 | 52 | 55 |
| 2018 | 45 | 73 |
| 2019 | 47 | 44 |
| 2020 | 37 | 54 |
| 2021 | 41 | 55 |
| 2022 | 34 | 53 |
| 2023 | 38 | 59 |
| 2024 | 45 | 53 |
| 2025 | 48 | 60 |
| 2026 | 24 | 40 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Electronic device manufacturing method and lithography control processor8 Sep 2026US 12,730,385 B2Gigaphoton Inc.
- Radiation heating to dry moisture from air bearing shaft18 Aug 2026US 12,712,151 B2APPLIED Materials.Inc.
- System and method for radius of curvature modification of optical plates and lenses by irradiation with optical energy28 Jul 2026US 12,691,532 B2Lawrence Livermore National Security, LLC
- Electro-optic display stacks with segmented electrodes and methods of making the same21 Jul 2026US 12,687,757 B2E Ink Corporation
- Optical pulse stretcher, laser apparatus, and electronic device manufacturing method30 Jun 2026US 12,671,220 B2Gigaphoton Inc.
- Apparatus and method for acoustic control in a laser chamber20 Aug 2026US 2026/0246220 A1Cymer, Inc.
- Solid-state laser system and excimer laser apparatus20 Aug 2026US 2026/0246223 A1Gigaphoton Inc.
- Combined laser sources for sample characterization13 Aug 2026US 2026/0235527 A1KLA Corporation
- Laser chamber preionizer having acoustic scattering surface13 Aug 2026US 2026/0237956 A1Cymer, Inc.
- Excimer laser apparatus and electronic device manufacturing method30 Jul 2026US 2026/0221711 A1Gigaphoton Inc.
Most cited
By later US patents
- Reliable modular production quality narrow-band high REP rate excimer laser171US 6,128,323 ACymer, Inc. · 2000
- System for rapidly tuning a low pressure pulsed laser164US 4,868,834 AThe United States of America as represented by the Secretary of the Army · 1989
- Compact excimer laser including an electrode mounted in insulating relationship to wall of the laser162US 4,959,840 ACymer Laser Technologies · 1990
- Reliable, modular, production quality narrow-band high rep rate F.sub.2 laser160US 6,018,537 ACymer, Inc. · 2000
- Pulse power generating circuit with energy recovery157US 5,729,562 AAdvanced Pulse Power Technologies, Inc. · 1998