H01S 3/09713
With auxiliary ionisation
Official title: {with auxiliary ionisation, e.g. double discharge excitation}
H01S3/09713 (With auxiliary ionisation) appears on 193 US grants and 42 published applications in this corpus.
Search patents in H01S- Granted patents
- 193
- Published applications
- 42
- Assignees
- 85
- Inventors
- 357
- Latest grant
- 10 Jun 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 5 | 0 |
| 1977 | 6 | 0 |
| 1978 | 6 | 0 |
| 1979 | 5 | 0 |
| 1980 | 3 | 0 |
| 1981 | 3 | 0 |
| 1982 | 4 | 0 |
| 1983 | 7 | 0 |
| 1984 | 5 | 0 |
| 1985 | 16 | 0 |
| 1986 | 13 | 0 |
| 1987 | 10 | 0 |
| 1988 | 7 | 0 |
| 1989 | 8 | 0 |
| 1990 | 6 | 0 |
| 1991 | 8 | 0 |
| 1992 | 13 | 0 |
| 1993 | 8 | 0 |
| 1994 | 9 | 0 |
| 1995 | 1 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 6 | 0 |
| 1999 | 3 | 0 |
| 2000 | 1 | 0 |
| 2001 | 1 | 0 |
| 2002 | 1 | 1 |
| 2003 | 4 | 0 |
| 2004 | 0 | 3 |
| 2005 | 3 | 5 |
| 2006 | 2 | 0 |
| 2007 | 3 | 2 |
| 2008 | 0 | 4 |
| 2009 | 2 | 1 |
| 2010 | 4 | 2 |
| 2011 | 1 | 1 |
| 2012 | 0 | 1 |
| 2013 | 2 | 0 |
| 2014 | 1 | 4 |
| 2015 | 2 | 1 |
| 2016 | 2 | 2 |
| 2017 | 3 | 2 |
| 2018 | 1 | 2 |
| 2019 | 0 | 2 |
| 2020 | 1 | 0 |
| 2021 | 2 | 1 |
| 2022 | 0 | 1 |
| 2023 | 2 | 2 |
| 2024 | 1 | 1 |
| 2025 | 2 | 0 |
| 2026 | 0 | 4 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Chamber device, and electronic device manufacturing method10 Jun 2025US 12,327,975 B2Gigaphoton Inc.
- Light emitting sealed body and light source device7 Jan 2025US 12,191,623 B2Energetiq Technology, Inc.
- Light emitting sealed body and light source device2 Jan 2024US 11,862,922 B2Energetiq Technology, Inc.
- Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus11 Apr 2023US 11,626,704 B2ASML Netherlands B. V.
- Laser chamber apparatus, gas laser apparatus, and method for manufacturing electronic device21 Feb 2023US 11,588,291 B2Gigaphoton Inc.
- Laser chamber preionizer having acoustic scattering surface13 Aug 2026US 2026/0237956 A1Cymer, Inc.
- Laser chamber, laser device, and electronic device manufacturing method16 Jul 2026US 2026/0204859 A1Gigaphoton Inc.
- Laser chamber and electronic device manufacturing method4 Jun 2026US 2026/0155616 A1Gigaphoton Inc.
- Chamber device, gas laser device, and electronic device manufacturing method16 Apr 2026US 2026/0106426 A1Gigaphoton Inc.
- Light emitting sealed body and light source device21 Mar 2024US 2024/0097394 A1Energetiq Technology, Inc.
Most cited
By later US patents
- Reliable, modular, production quality narrow-band high rep rate F.sub.2 laser160US 6,018,537 ACymer, Inc. · 2000
- Pulse energy control for excimer laser146US 6,005,879 ACymer, Inc. · 1999
- Method of annealing implanted semiconductors by lasers108US 4,370,175 A1983
- Pulsed electric discharge laser utilizing water dielectric blumlein transmission line106US 4,223,279 AMathematical Sciences Northwest, Inc. · 1980
- Very narrow band KrF laser93US 5,835,520 ACymer, Inc. · 1998