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US 5,835,520 AGranted
Very narrow band KrF laser
AssigneeCymer, Inc.
InventorsPalash Parijat Das, Alexander I. Ershov
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Abstract
A very narrow band KrF excimer laser capable of producing 10 mJ laser pulses at 1000 Hz with a bandwidth of less than 0.6 nm (FWHM). The very narrow bandwidth is achieved by reducing fluorine partial pressure to less than 0.08 and by increasing the reflectance of the output coupler to greater than 25 percent. In a preferred embodiment, prior art fused silica beam expansion prisms used in the prior art line narrowing module were replaced with calcium fluoride prisms.
Claims4
A very narrow band KrF excimer laser comprising:
- A. a laser chamber comprised of fluorine compatible materials and containing:
- (1) two elongated electrodes;
- (2) at least one preionizer;
- (3) laser gas defining a total pressure and comprised of krypton, fluorine and a buffer gas, said fluorine having a partial pressure of less than 0.08 of the total pressure;
- B. a line narrowing module comprised of:
- (1) at least one beam expanding prism;
- (2) a grating;
- (3) a tuning means for tuning the grating;
- and
- C. an output coupler having a reflectance of at least 25%.
7 more elements
Dependencies are inferred from the claim text.