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US 12,327,975 B2Granted
Chamber device, and electronic device manufacturing method
AssigneeGigaphoton Inc.
InventorsJunichi Fujimoto, Takahiro Tatsumi, Kazuki Nagai, Jeffrey P. Sercel
Life of this patent
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Abstract
A chamber device includes an inner housing including a passage port through which light generated by excitation of laser gas at an internal space thereof passes, an outer housing surrounding at least a part of the inner housing from a lateral side of a travel direction of the light, and a partition wall arranged between the inner housing and the outer housing and fixed to the inner housing and the outer housing.
Claims20
A chamber device comprising:
- an inner housing including a passage port through which light generated by excitation of laser gas at an internal space thereof passes;
- an outer housing surrounding at least a part of the inner housing from a lateral side of a travel direction of the light;
- and
- a partition wall arranged between the inner housing and the outer housing and fixed to the inner housing and the outer housing.
1 more element
An electronic device manufacturing method, comprising:
- generating laser light using a gas laser device including a chamber device;
- outputting the laser light to an exposure apparatus;
- and
- exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture an electronic device,
- the chamber device including:
- an inner housing including a passage port through which light generated by excitation of laser gas at an internal space thereof passes;
- an outer housing surrounding at least a part of the inner housing from a lateral side of a travel direction of the light;
- and
- a partition wall arranged between the inner housing and the outer housing and fixed to the inner housing and the outer housing.
6 more elements
Dependencies are inferred from the claim text.