H01S 3/0971
Transversely excited
Official title: transversely excited (H01S3/0975 takes precedence)
H01S3/0971 (Transversely excited) appears on 488 US grants and 295 published applications in this corpus.
Search patents in H01S- Granted patents
- 488
- Published applications
- 295
- Assignees
- 154
- Inventors
- 803
- Latest grant
- 2 Dec 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 9 | 0 |
| 1977 | 9 | 0 |
| 1978 | 11 | 0 |
| 1979 | 12 | 0 |
| 1980 | 7 | 0 |
| 1981 | 8 | 0 |
| 1982 | 5 | 0 |
| 1983 | 9 | 0 |
| 1984 | 6 | 0 |
| 1985 | 18 | 0 |
| 1986 | 16 | 0 |
| 1987 | 14 | 0 |
| 1988 | 10 | 0 |
| 1989 | 11 | 0 |
| 1990 | 9 | 0 |
| 1991 | 18 | 0 |
| 1992 | 15 | 0 |
| 1993 | 15 | 0 |
| 1994 | 12 | 0 |
| 1995 | 2 | 0 |
| 1996 | 4 | 0 |
| 1997 | 5 | 0 |
| 1998 | 11 | 0 |
| 1999 | 9 | 0 |
| 2000 | 6 | 0 |
| 2001 | 5 | 3 |
| 2002 | 9 | 27 |
| 2003 | 20 | 8 |
| 2004 | 17 | 14 |
| 2005 | 11 | 17 |
| 2006 | 11 | 8 |
| 2007 | 12 | 9 |
| 2008 | 4 | 17 |
| 2009 | 12 | 3 |
| 2010 | 8 | 7 |
| 2011 | 3 | 6 |
| 2012 | 5 | 9 |
| 2013 | 11 | 6 |
| 2014 | 5 | 14 |
| 2015 | 7 | 15 |
| 2016 | 17 | 12 |
| 2017 | 16 | 16 |
| 2018 | 9 | 12 |
| 2019 | 7 | 17 |
| 2020 | 8 | 13 |
| 2021 | 12 | 12 |
| 2022 | 5 | 5 |
| 2023 | 8 | 7 |
| 2024 | 6 | 7 |
| 2025 | 9 | 13 |
| 2026 | 0 | 18 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Prolonged life laser chamber electrode and laser having same2 Dec 2025US 12,489,266 B2Cymer, Inc.
- Radio frequency slab laser26 Aug 2025US 12,401,168 B2Kern Technologies, LLC
- Laser device and leak check method for laser device12 Aug 2025US 12,388,228 B2Gigaphoton Inc.
- Chamber device, gas laser device, and electronic device manufacturing method1 Jul 2025US 12,347,995 B2Gigaphoton Inc.
- Chamber device, and electronic device manufacturing method10 Jun 2025US 12,327,975 B2Gigaphoton Inc.
- Laser chamber and electronic device manufacturing method17 Sep 2026US 2026/0280217 A1Gigaphoton Inc.
- A device and method for resonant pumping of optical gain medium in a manner orthogonal to a laser mode27 Aug 2026US 2026/0254185 A1Ramot at Tel-Aviv University Ltd.
- Apparatus and method for acoustic control in a laser chamber20 Aug 2026US 2026/0246220 A1Cymer, Inc.
- Laser chamber preionizer having acoustic scattering surface13 Aug 2026US 2026/0237956 A1Cymer, Inc.
- Excimer laser apparatus and electronic device manufacturing method30 Jul 2026US 2026/0221711 A1Gigaphoton Inc.
Most cited
By later US patents
- Reliable modular production quality narrow-band high REP rate excimer laser171US 6,128,323 ACymer, Inc. · 2000
- Compact excimer laser including an electrode mounted in insulating relationship to wall of the laser162US 4,959,840 ACymer Laser Technologies · 1990
- Reliable, modular, production quality narrow-band high rep rate F.sub.2 laser160US 6,018,537 ACymer, Inc. · 2000
- Wavelength system for an excimer laser146US 5,978,394 ACymer, Inc. · 1999
- Pulse energy control for excimer laser146US 6,005,879 ACymer, Inc. · 1999