Laser device and leak check method for laser device
AssigneeGigaphoton Inc.
InventorsHiroaki Tsushima, Yousuke Kawagoe, Makoto Tanaka
Life of this patent
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Abstract
A leak check method for a laser device includes exposing a closed space accommodating laser medium gas to the atmosphere, isolating the closed space from the atmosphere after exposing the closed space to the atmosphere, introducing neon-containing gas containing neon gas to the closed space, and determining whether or not the neon gas is leaking to outside of the closed space.
Claims20
A leak check method for a laser device, comprising:
- exposing a closed space accommodating laser medium gas to the atmosphere;
- isolating the closed space from the atmosphere after exposing the closed space to the atmosphere;
- introducing neon-containing gas containing neon gas to the closed space;
- and
- determining whether or not the neon gas is leaking to outside of the closed space using a leak detector having sensitivity to neon gas.
A leak check method for a laser device, the laser device including a laser chamber, a first pipe configured to introduce first gas containing neon gas and fluorine gas into the laser chamber, and a second pipe configured to introduce second gas containing neon gas and having fluorine gas concentration lower than that of the first gas into the laser chamber, the leak check method comprising:
- introducing third gas containing neon gas and having fluorine gas concentration lower than that of the first gas into a closed space including a space inside the laser chamber;
- and
- determining whether or not neon gas is leaking to outside of the closed space using a leak detector having sensitivity to neon gas.
A laser device, comprising:
- a laser chamber;
- a first pipe connected to a first gas supply source storing first gas containing neon gas and fluorine gas so as to introduce the first gas into the laser chamber;
- a second pipe connected to a second gas supply source storing second gas containing neon gas and having fluorine gas concentration lower than that of the first gas so as to introduce the second gas into the laser chamber;
- and
- a third pipe connected to the second gas supply source so as to introduce the second gas into the laser chamber and the first pipe.
Dependencies are inferred from the claim text.