H01S 3/097
By gas discharge of a gas laser
Official title: by gas discharge of a gas laser
H01S3/097 (By gas discharge of a gas laser) appears on 1,114 US grants and 555 published applications in this corpus.
Search patents in H01S- Granted patents
- 1,114
- Published applications
- 555
- Assignees
- 315
- Inventors
- 1,534
- Latest grant
- 23 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 24 | 0 |
| 1977 | 29 | 0 |
| 1978 | 22 | 0 |
| 1979 | 21 | 0 |
| 1980 | 25 | 0 |
| 1981 | 21 | 0 |
| 1982 | 19 | 0 |
| 1983 | 22 | 0 |
| 1984 | 18 | 0 |
| 1985 | 37 | 0 |
| 1986 | 39 | 0 |
| 1987 | 39 | 0 |
| 1988 | 30 | 0 |
| 1989 | 46 | 0 |
| 1990 | 30 | 0 |
| 1991 | 36 | 0 |
| 1992 | 30 | 0 |
| 1993 | 28 | 0 |
| 1994 | 32 | 0 |
| 1995 | 21 | 0 |
| 1996 | 9 | 0 |
| 1997 | 12 | 0 |
| 1998 | 20 | 0 |
| 1999 | 17 | 0 |
| 2000 | 15 | 0 |
| 2001 | 20 | 8 |
| 2002 | 17 | 43 |
| 2003 | 32 | 18 |
| 2004 | 34 | 33 |
| 2005 | 18 | 32 |
| 2006 | 31 | 28 |
| 2007 | 25 | 18 |
| 2008 | 16 | 32 |
| 2009 | 19 | 10 |
| 2010 | 17 | 12 |
| 2011 | 9 | 16 |
| 2012 | 11 | 17 |
| 2013 | 18 | 18 |
| 2014 | 17 | 22 |
| 2015 | 19 | 32 |
| 2016 | 30 | 22 |
| 2017 | 25 | 26 |
| 2018 | 16 | 21 |
| 2019 | 12 | 24 |
| 2020 | 17 | 21 |
| 2021 | 18 | 21 |
| 2022 | 11 | 11 |
| 2023 | 14 | 15 |
| 2024 | 12 | 17 |
| 2025 | 13 | 18 |
| 2026 | 1 | 20 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- H01S 3/0971Transversely excited488
- H01S 3/0975Using inductive or capacitive excitation309
- H01S 3/09702Details of the driver electronics and electric discharge circuits184
- H01S 3/09705With particular means for stabilising the discharge77
- H01S 3/09707Using an electron or ion beam64
- H01S 3/0979Gas dynamic lasers, i.e. with expansion of the laser gas medium to64
- H01S 3/0977Having auxiliary ionisation means30
Recent patents
- Laser apparatus, wavelength control method, and electronic device manufacturing method23 Jun 2026US 12,665,381 B2Gigaphoton Inc.
- Prolonged life laser chamber electrode and laser having same2 Dec 2025US 12,489,266 B2Cymer, Inc.
- Apparatus for and method of modulating a light source wavelength7 Oct 2025US 12,438,334 B2Cymer, Inc.
- Laser device, laser control method, and electronic device manufacturing method23 Sep 2025US 12,424,813 B2Gigaphoton Inc.
- Radio frequency slab laser26 Aug 2025US 12,401,168 B2Kern Technologies, LLC
- Laser chamber and electronic device manufacturing method17 Sep 2026US 2026/0280217 A1Gigaphoton Inc.
- A device and method for resonant pumping of optical gain medium in a manner orthogonal to a laser mode27 Aug 2026US 2026/0254185 A1Ramot at Tel-Aviv University Ltd.
- Apparatus and method for acoustic control in a laser chamber20 Aug 2026US 2026/0246220 A1Cymer, Inc.
- Laser chamber preionizer having acoustic scattering surface13 Aug 2026US 2026/0237956 A1Cymer, Inc.
- Excimer laser apparatus and electronic device manufacturing method30 Jul 2026US 2026/0221711 A1Gigaphoton Inc.
Most cited
By later US patents
- Reliable modular production quality narrow-band high REP rate excimer laser171US 6,128,323 ACymer, Inc. · 2000
- Compact excimer laser including an electrode mounted in insulating relationship to wall of the laser162US 4,959,840 ACymer Laser Technologies · 1990
- Reliable, modular, production quality narrow-band high rep rate F.sub.2 laser160US 6,018,537 ACymer, Inc. · 2000
- Pulse power generating circuit with energy recovery157US 5,729,562 AAdvanced Pulse Power Technologies, Inc. · 1998
- Wavelength system for an excimer laser146US 5,978,394 ACymer, Inc. · 1999