Laser apparatus, wavelength control method, and electronic device manufacturing method

A wavelength control method for a laser apparatus including

• a first optical element and a second optical element,
• a first actuator configured to change a first wavelength component included in a pulse laser beam by changing a posture of the first optical element,
• a second actuator configured to change a second wavelength component included in the pulse laser beam by changing a posture of the second optical element,
• a first encoder configured to measure a position of the first actuator,
• a second encoder configured to measure a position of the second actuator,
• an optical meter configured to measure the first wavelength component and the second wavelength component,
• a third actuator configured to change an intensity ratio between the first wavelength component and the second wavelength component, and
• a processor,
• the wavelength control method comprising:
• measuring, by the processor, the first wavelength component by using the optical meter in a state in which a proportion of the first wavelength component is set to be larger than a proportion of the second wavelength component by the third actuator;
• storing, in a storage device, a relation between the position of the first actuator measured by the first encoder and the first wavelength component, as a first relation;
• measuring, by the processor, the second wavelength component by using the optical meter in a state in which the proportion of the second wavelength component is set to be larger than the proportion of the first wavelength component by the third actuator;
• storing, in the storage device, a relation between the position of the second actuator measured by the second encoder and the second wavelength component, as a second relation;
• reading, by the processor, the first relation and the second relation;
• and
• performing, by the processor, control of the first actuator based on the first relation and the position of the first actuator measured by the first encoder and control of the second actuator based on the second relation and the position of the second actuator measured by the second encoder.

An electronic device manufacturing method comprising:

• generating a pulse laser beam with a laser apparatus, the laser apparatus including
• a first optical element and a second optical element,
• a first actuator configured to change a first wavelength component included in the pulse laser beam by changing a posture of the first optical element,
• a second actuator configured to change a second wavelength component included in the pulse laser beam by changing a posture of the second optical element,
• a first encoder configured to measure a position of the first actuator,
• a second encoder configured to measure a position of the second actuator,
• an optical meter configured to measure the first wavelength component and the second wavelength component,
• a third actuator configured to change an intensity ratio between the first wavelength component and the second wavelength component, and
• a processor configured to
• measure the first wavelength component by using the optical meter in a state in which a proportion of the first wavelength component is set to be larger than a proportion of the second wavelength component by the third actuator,
• store, in a storage device, a relation between the position of the first actuator measured by the first encoder and the first wavelength component, as a first relation,
• measure the second wavelength component by using the optical meter in a state in which the proportion of the second wavelength component is set to be larger than the proportion of the first wavelength component by the third actuator,
• store, in the storage device, a relation between the position of the second actuator measured by the second encoder and the second wavelength component, as a second relation,
• read the first relation and the second relation, and
• perform control of the first actuator based on the first relation and the position of the first actuator measured by the first encoder and control of the second actuator based on the second relation and the position of the second actuator measured by the second encoder;
• outputting the pulse laser beam to an exposure apparatus;
• and
• exposing a photosensitive substrate to the pulse laser beam in the exposure apparatus to manufacture an electronic device.