H01S 3/0977
Having auxiliary ionisation means
Official title: having auxiliary ionisation means {(H01S3/09713 takes precedence)}
H01S3/0977 (Having auxiliary ionisation means) appears on 30 US grants and 14 published applications in this corpus.
Search patents in H01S- Granted patents
- 30
- Published applications
- 14
- Assignees
- 23
- Inventors
- 74
- Latest grant
- 14 Aug 2018
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1980 | 1 | 0 |
| 1981 | 1 | 0 |
| 1982 | 2 | 0 |
| 1983 | 1 | 0 |
| 1984 | 2 | 0 |
| 1985 | 3 | 0 |
| 1986 | 0 | 0 |
| 1987 | 1 | 0 |
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 1 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 1 |
| 2003 | 3 | 0 |
| 2004 | 1 | 1 |
| 2005 | 1 | 2 |
| 2006 | 0 | 1 |
| 2007 | 2 | 1 |
| 2008 | 1 | 0 |
| 2009 | 1 | 0 |
| 2010 | 0 | 0 |
| 2011 | 0 | 0 |
| 2012 | 0 | 0 |
| 2013 | 0 | 1 |
| 2014 | 1 | 0 |
| 2015 | 1 | 2 |
| 2016 | 0 | 1 |
| 2017 | 2 | 1 |
| 2018 | 1 | 0 |
| 2019 | 0 | 0 |
| 2020 | 0 | 0 |
| 2021 | 0 | 0 |
| 2022 | 0 | 0 |
| 2023 | 0 | 1 |
| 2024 | 0 | 1 |
| 2025 | 0 | 1 |
By publication year. Applications have been published since 2001.
Subgroups
Granted patents
Recent patents
- Excimer laser chamber device14 Aug 2018US 10,050,403 B2Gigaphoton Inc.
- Preliminary ionization discharge device and laser apparatus29 Aug 2017US 9,748,727 B2Gigaphoton Inc.
- Method for stabilizing a plasma and an improved ionization chamber21 Mar 2017US 9,601,320 B2Laser Systems & Solutions of Europe
- Slab gas laser with pre-ionizing cell2 Jun 2015US 9,048,615 B1Epilog Corporation
- Gas laser pre-ionization optical monitoring and compensation30 Dec 2014US 8,923,356 B1Kern Technologies, LLC
- Laser chamber apparatus, gas laser apparatus, and electronic device manufacturing method27 Nov 2025US 2025/0364769 A1Gigaphoton Inc.
- Chamber of gas laser apparatus and electronic device manufacturing method5 Dec 2024US 2024/0405497 A1Gigaphoton Inc.
- Gas laser apparatus and electronic device manufacturing method24 Aug 2023US 2023/0268710 A1Gigaphoton Inc.
- Excimer laser chamber device30 Nov 2017US 2017/0346252 A1Gigaphoton Inc.
- Preliminary ionization discharge device and laser apparatus16 Jun 2016US 2016/0172817 A1Gigaphoton Inc.
Most cited
By later US patents
- Matched impedance controlled avalanche driver60US 7,215,697 B22007
- Tandem electric discharges for exciting lasers30US 4,534,035 ANorthrop Corporation · 1985
- Ring laser start up apparatus19US 4,481,635 AHoneywell Inc. · 1984
- Discharge excitation gas laser apparatus14US 5,313,487 AMitsubishi Denki Kabushiki Kaisha · 1994
- Gas laser generating device of the longitudinal gas flow type12US 4,287,487 AHitachi, Ltd. · 1981