Preliminary ionization discharge device and laser apparatus
AssigneeGigaphoton Inc.
InventorsKouji Kakizaki, Hiroaki Tsushima, Junichi Fujimoto, Natsushi Suzuki, Hisakazu Katsuumi
Life of this patent
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Abstract
A preliminary ionization discharge device used in a laser chamber of a laser apparatus using preliminary ionization includes a dielectric pipe; a preliminary ionization inner electrode provided inside the dielectric pipe; and a preliminary ionization outer electrode provided outside the dielectric pipe. The preliminary ionization outer electrode includes: a contact plate part configured to contact the dielectric pipe; and an elastic part configured to exert a force in a direction in which the contact plate part pushes the dielectric pipe.
Claims18
A preliminary ionization discharge device used in a laser chamber of a laser apparatus using preliminary ionization, comprising:
- a dielectric pipe;
- a preliminary ionization inner electrode provided inside the dielectric pipe;
- and
- a preliminary ionization outer electrode provided outside the dielectric pipe, the preliminary ionization outer electrode including:
- a contact plate part configured to contact the dielectric pipe;
- an elastic part configured to exert a force in a direction in which the contact plate part pushes the dielectric pipe, a first end of the elastic part being connected to the contact plate part;
- an additional elastic part configured to exert a force in the direction in which the contact plate part pushes the dielectric pipe;
- and
- a fixed plate part connected to a second end of the elastic part that is opposite to the first end,
- wherein the additional elastic part is fixed to the fixed plate part.
A laser apparatus comprising:
- a laser chamber configured to contain laser gas;
- a pair of discharge electrodes provided in the laser chamber;
- and
- a preliminary ionization discharge device including:
- a dielectric pipe;
- a preliminary ionization inner electrode provided inside the dielectric pipe;
- and
- a preliminary ionization outer electrode provided outside the dielectric pipe, the preliminary ionization outer electrode including:
- a contact plate part configured to contact the dielectric pipe;
- an elastic part configured to exert a force in a direction in which the contact plate part pushes the dielectric pipe, a first end of the elastic part being connected to the contact plate part;
- an additional elastic part configured to exert a force in the direction in which the contact plate part pushes the dielectric pipe;
- and
- a fixed plate part connected to a second end of the elastic part that is opposite to the first end,
- wherein the additional elastic part is fixed to the fixed plate part.
Dependencies are inferred from the claim text.