Preliminary ionization discharge device and laser apparatus
AssigneeGigaphoton Inc.
InventorsKouji KAKIZAKI, Hiroaki TSUSHIMA, Junichi FUJIMOTO, Natsushi SUZUKI, Hisakazu KATSUUMI
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Abstract
A preliminary ionization discharge device used in a laser chamber of a laser apparatus using preliminary ionization includes a dielectric pipe; a preliminary ionization inner electrode provided inside the dielectric pipe; and a preliminary ionization outer electrode provided outside the dielectric pipe. The preliminary ionization outer electrode includes: a contact plate part configured to contact the dielectric pipe; and an elastic part configured to exert a force in a direction in which the contact plate part pushes the dielectric pipe.
Claims10
A preliminary ionization discharge device used in a laser chamber of a laser apparatus using preliminary ionization, comprising:
- a dielectric pipe;
- a preliminary ionization inner electrode provided inside the dielectric pipe;
- and
- a preliminary ionization outer electrode provided outside the dielectric pipe, the preliminary ionization outer electrode including:
- a contact plate part configured to contact the dielectric pipe;
- and
- an elastic part configured to exert a force in a direction in which the contact plate part pushes the dielectric pipe.
A preliminary ionization discharge device used in a laser chamber of a laser apparatus using preliminary ionization, comprising:
- a dielectric pipe;
- a preliminary ionization inner electrode provided inside the dielectric pipe;
- and
- a preliminary ionization outer electrode provided outside the dielectric pipe and including a contact plate part configured to contact the dielectric pipe,
- wherein a protection film made of a material including a dielectric material is formed on a surface of the contact plate part.
A laser apparatus comprising:
- a laser chamber configured to contain laser gas;
- a pair of discharge electrodes provided in the laser chamber;
- and
- a preliminary ionization discharge device including:
- a dielectric pipe;
- a preliminary ionization inner electrode provided inside the dielectric pipe;
- and
- a preliminary ionization outer electrode provided outside the dielectric pipe,
- the preliminary ionization outer electrode including:
- a contact plate part configured to contact the dielectric pipe;
- an elastic part configured to exert a force in a direction in which the contact plate part pushes the dielectric pipe;
- and
- an additional elastic part configured to exert a force in the direction in which the contact plate part pushes the dielectric pipe.
Dependencies are inferred from the claim text.