Excimer laser chamber device

An excimer laser chamber device comprising:

• a laser chamber having an opening;
• an electrical insulator configured to seal the opening;
• a first electrode provided in the laser chamber;
• a second electrode provided in the laser chamber to face the first electrode and to be connected to a ground potential;
• an electrode holder provided in the laser chamber to be connected to a high voltage via a conductive element penetrating the electrical insulator;
• at least one connecting terminal including a first anchored portion anchored to the first electrode and a second anchored portion anchored to the electrode holder, the at least one connecting terminal being configured to electrically connect the first electrode and the electrode holder;
• a guide member held by the electrode holder, the guide member being configured to position the first electrode in a direction substantially perpendicular to both a direction of electric discharge between the first electrode and the second electrode and a longitudinal direction of the first electrode;
• and
• an electrode-gap-varying unit penetrating the electrical insulator and configured to move the first electrode in a direction substantially parallel to the direction of electric discharge.