H01S 3/09705
With particular means for stabilising the discharge
Official title: {with particular means for stabilising the discharge}
H01S3/09705 (With particular means for stabilising the discharge) appears on 77 US grants and 72 published applications in this corpus.
Search patents in H01S- Granted patents
- 77
- Published applications
- 72
- Assignees
- 23
- Inventors
- 179
- Latest grant
- 2 Apr 2024
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 2 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 1 | 0 |
| 1985 | 1 | 0 |
| 1986 | 0 | 0 |
| 1987 | 3 | 0 |
| 1988 | 1 | 0 |
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 1 | 0 |
| 1992 | 1 | 0 |
| 1993 | 2 | 0 |
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 1 | 0 |
| 2001 | 1 | 0 |
| 2002 | 2 | 10 |
| 2003 | 5 | 8 |
| 2004 | 9 | 4 |
| 2005 | 3 | 4 |
| 2006 | 4 | 4 |
| 2007 | 4 | 3 |
| 2008 | 0 | 1 |
| 2009 | 3 | 3 |
| 2010 | 3 | 0 |
| 2011 | 0 | 1 |
| 2012 | 0 | 3 |
| 2013 | 3 | 2 |
| 2014 | 3 | 2 |
| 2015 | 3 | 4 |
| 2016 | 3 | 4 |
| 2017 | 6 | 1 |
| 2018 | 0 | 2 |
| 2019 | 1 | 4 |
| 2020 | 1 | 2 |
| 2021 | 4 | 4 |
| 2022 | 1 | 1 |
| 2023 | 1 | 1 |
| 2024 | 1 | 2 |
| 2025 | 0 | 1 |
| 2026 | 0 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Laser chamber and electronic device manufacturing method2 Apr 2024US 11,947,263 B2Gigaphoton Inc.
- Method of and apparatus for extending electrode life in a laser chamber3 Oct 2023US 11,777,271 B2Cymer, Inc.
- Apparatus for tuning discharge performance in a laser chamber31 May 2022US 11,349,273 B2Cymer, Inc.
- Laser chamber with metal damper member30 Mar 2021US 10,965,085 B2Gigaphoton Inc.
- Laser device, laser machining apparatus, and method for controlling output of laser device30 Mar 2021US 10,965,089 B2Mitsubishi Electric Corporation
- Chamber device, gas laser device, and electronic device manufacturing method16 Apr 2026US 2026/0106426 A1Gigaphoton Inc.
- Electrode with engineered surface for improved energy performance17 Apr 2025US 2025/0125572 A1Cymer, Inc.
- Pulsed power systems with controlled reactor reset22 Aug 2024US 2024/0283210 A1Cymer, Inc.
- Magnetic switch with impedance control for an optical system25 Jan 2024US 2024/0030673 A1Cymer, Inc.
- Undercut electrodes for a gas discharge laser chamber19 Jan 2023US 2023/0016894 A1Cymer, Inc.
Most cited
By later US patents
- Very narrow band, two chamber, high rep rate gas discharge laser system144US 6,567,450 B2Cymer, Inc. · 2003
- Very narrow band, two chamber, high rep rate gas discharge laser system136US 6,625,191 B2Cymer, Inc. · 2003
- Injection seeded laser with precise timing control96US 6,549,551 B2Cymer, Inc. · 2003
- High power waveguide laser72US 6,788,722 B1Coherent, Inc. · 2004
- Control system for a two chamber gas discharge laser70US 6,690,704 B2Cymer, Inc. · 2004