Chamber device, gas laser device, and electronic device manufacturing method

A gas laser device comprising:

• a chamber device, a pulse power module, and a charger,
• the chamber device including:
• a metal housing having an opening through which a laser gas and a discharge electrode are stored, the opening having an end portion that has a stepped shape over an entire circumference thereof;
• a ceramic electrically insulating plate having a planar shape surrounded by two sets of opposed straight edges and four corner portions, and having a stepped end portion that is fitted with the end portion of the opening around an entire circumference so as to cover the opening;
• a pressing member pressing the two sets of opposed straight edges against the end portion of the opening while the four corner portions are exposed;
• a groove formed to surround the opening on a receiving surface that receives the end portion of the electrically insulating plate at the end portion of the opening;
• and
• an O-ring arranged in the groove,
• a surface of the end portion of the electrically insulating plate facing the receiving surface including, at at least one of the four corner portions, a contact surface that is in contact with the receiving surface and covers the groove, and a spaced surface that is spaced apart from the receiving surface on an outer peripheral side with respect to the contact surface,
• the pulse power module being connected to the discharge electrode via a plurality of feedthroughs embedded in the electrically insulating plate;
• and
• the charger being configured to supply a voltage to the pulse power module.

An electronic device manufacturing method, comprising:

• generating laser light using a gas laser device;
• outputting the laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture an electronic device,
• the gas laser device including a chamber device, a pulse power module, and a charger,
• the chamber device including:
• a metal housing having an opening through which a laser gas and a discharge electrode are stored, the opening having an end portion that has a stepped shape over an entire circumference thereof;
• a ceramic electrically insulating plate having a planar shape surrounded by two sets of opposed straight edges and four corner portions, and having a stepped end portion that is fitted with the end portion of the opening around an entire circumference so as to cover the opening;
• a pressing member pressing the two sets of opposed straight edges against the end portion of the opening while the four corner portions are exposed;
• a groove formed to surround the opening on a receiving surface that receives the end portion of the electrically insulating plate at the end portion of the opening;
• and
• an O-ring arranged in the groove,
• a surface of the end portion of the electrically insulating plate facing the receiving surface including, at at least one of the four corner portions, a contact surface that is in contact with the receiving surface and covers the groove, and a spaced surface that is spaced apart from the receiving surface on an outer peripheral side with respect to the contact surface,
• the pulse power module being connected to the discharge electrode via a plurality of feedthroughs embedded in the electrically insulating plate;
• and
• the charger being configured to supply a charge voltage to the pulse power module.