Laser chamber and electronic device manufacturing method

A laser chamber of a discharge-excitation-type gas laser apparatus, comprising:

• a container which contains laser gas therein;
• a pair of discharge electrodes arranged in the container;
• a cross flow fan configured to supply the laser gas to a discharge space between the discharge electrodes, the cross flow fan including a rotation shaft with which the cross flow fan rotates in a predetermined rotation direction and a plurality of blades, each longitudinal direction of which is parallel to an axial direction of the rotation shaft;
• and
• a stabilizer arranged outside a rotation trajectory of the cross flow fan, and arranged such that a difference between a maximum position and a minimum position of an end portion in the rotation direction on a side opposite to the rotation direction is larger than 0 and is smaller than an interval of two blades adjacent to each other among the plurality of blades,
• wherein the stabilizer includes a guide surface which configures a part of a wall surface of a flow path of the laser gas flowing toward the discharge space and on which a plurality of grooves are formed.

An electronic device manufacturing method, comprising:

• generating laser light using an excimer laser apparatus including a laser chamber;
• emitting the laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture an electronic device,
• the laser chamber including:
• a container which contains laser gas therein;
• a pair of discharge electrodes arranged in the container;
• a cross flow fan configured to supply the laser gas to a discharge space between the discharge electrodes, the cross flow fan including a rotation shaft with which the cross flow fan rotates in a predetermined rotation direction and a plurality of blades, each longitudinal direction of which is parallel to an axial direction of the rotation shaft;
• and
• a stabilizer arranged outside a rotation trajectory of the cross flow fan, and arranged such that a difference in the rotation direction between a maximum position and a minimum position of an end portion on a side opposite to the rotation direction is larger than 0 and is smaller than an interval of two blades adjacent to each other among the plurality of blades blades,
• wherein a position of the end portion in the rotation direction changes in accordance with a position of the end portion in the axial direction, and
• wherein a cycle of the position of the end portion in the rotation direction is equal to or smaller than twice a wavelength of an acoustic wave generated between the cross flow fan and the stabilizer.