Undercut electrodes for a gas discharge laser chamber

An undercut electrode comprising:

• a first surface inwardly facing a gas discharge medium;
• a second surface opposite the first surface;
• and
• recessed portions formed at each end of the undercut electrode.

A pair of opposing electrodes configured to excite a gas medium to form a plasma, each electrode of the pair of electrodes comprising:

• a first surface inwardly facing the gas medium;
• and
• a second surface opposite the first surface,
• wherein at least one electrode of the pair of opposing electrodes comprises recessed portions formed at each end of the at least one electrode.

A light source apparatus comprising:

• a chamber configured to hold a gas discharge medium;
• and
• a pair of opposed electrodes configured to excite the gas discharge medium to produce a plasma that produces an output light beam,
• wherein at least one electrode of the pair of opposing electrodes comprises at least one of at least one recessed portion or at least one hollowed-out portion.