Laser device, laser control method, and electronic device manufacturing method

A laser control method comprising:

• outputting pulse laser light from a master oscillator at a first discharge timing synchronized with a repetition frequency;
• amplifying the pulse laser light by exciting, with a charge voltage at a second discharge timing obtained by adding a delay time to the first discharge timing, a laser medium of an amplifier through which the pulse laser light passes;
• providing a command on the charge voltage to the amplifier based on a charge voltage command value provided from an exposure apparatus;
• and
• performing a process of changing the delay time and a process of correcting the charge voltage command value in accordance with a change of the repetition frequency.

An electronic device manufacturing method, comprising:

• generating laser light using a laser device;
• outputting the laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture an electronic device,
• the laser device including:
• a master oscillator configured to output pulse laser light at a first discharge timing synchronized with a repetition frequency;
• an amplifier configured to amplify the pulse laser light by exciting, with a charge voltage at a second discharge timing, a laser medium through which the pulse laser light passes;
• and
• a processor configured to provide a command on the charge voltage to the amplifier based on a charge voltage command value provided from an exposure apparatus, set the second discharge timing by adding a delay time to the first discharge timing, and perform a process of changing the delay time and a process of correcting the charge voltage command value in accordance with a change of the repetition frequency.